Optical properties of mist CVD grown κ-Ga2O3

被引:2
作者
Ul Muazzam, Usman [1 ]
Chavan, Prasad S. [1 ]
Muralidharan, Rangarajan [1 ]
Raghavan, Srinivasan [1 ]
Nath, Digbijoy N. [1 ]
机构
[1] Indian Inst Sci, Ctr Nano Sci & Engn, Bengaluru 560012, India
关键词
kappa-Ga2O3; mosaic crystal model; exciton; Elliott model; MSM photodetector; parabolic WKB model; temperature dependent I-V; CHEMICAL-VAPOR-DEPOSITION; THIN-FILMS; EPSILON-GA2O3; SAPPHIRE; MOCVD; METAL;
D O I
10.1088/1361-6641/ac6129
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We report on the growth of crystalline kappa-Ga2O3 using mist-chemical vapor deposition (CVD) on (0001) sapphire. The kappa-phase was confirmed using high-resolution x-ray diffraction (XRD) theta-2 theta scan and pole figure-scan of (122) reflex, respectively, while an on-axis full width at half maximum (FWHM) of 104 arcsec was measured in symmetric rocking curve scan. Further, the heteroepitaxial film was analyzed using a mosaic crystal model employing reciprocal space maps (RSM) and a series of asymmetric rocking curve scans. A bandgap of 5.1 eV and excitonic binding energy of 85 meV were estimated from absorption measurements. Built-in field, depletion width, and doping density level were extracted from parabolic WKB model fit. Cathodoluminescence (CL) spectroscopy revealed a defect peak at 329 nm, which was found to be blue-shift with increasing excitation energy, indicating a possible donor-acceptor pair (DAP) transition. Temperature-dependent Current-voltage (I-V) study was performed to extract Schottky barrier height (Phi(B)) and ideality factor (eta), which were found to be correlated with temperature. Photodetectors fabricated on the sample exhibited pure solar-blind characteristics.
引用
收藏
页数:9
相关论文
共 48 条
[1]   Heteroepitaxial growth of single-phase ε-Ga2O3 thin films on c-plane sapphire by mist chemical vapor deposition using a NiO buffer layer [J].
Arata, Y. ;
Nishinaka, H. ;
Tahara, D. ;
Yoshimoto, M. .
CRYSTENGCOMM, 2018, 20 (40) :6236-6242
[2]   Role of self-trapped holes in the photoconductive gain of β-gallium oxide Schottky diodes [J].
Armstrong, Andrew M. ;
Crawford, Mary H. ;
Jayawardena, Asanka ;
Ahyi, Ayayi ;
Dhar, Sarit .
JOURNAL OF APPLIED PHYSICS, 2016, 119 (10)
[3]   Julia: A Fresh Approach to Numerical Computing [J].
Bezanson, Jeff ;
Edelman, Alan ;
Karpinski, Stefan ;
Shah, Viral B. .
SIAM REVIEW, 2017, 59 (01) :65-98
[4]   Stabilization and enhanced energy gap by Mg doping in ε-phase Ga2O3 thin films [J].
Bi, Xiaoyu ;
Wu, Zhenping ;
Huang, Yuanqi ;
Tang, Weihua .
AIP ADVANCES, 2018, 8 (02)
[5]   Hetero-epitaxy of ε-Ga2O3 layers by MOCVD and ALD [J].
Boschi, F. ;
Bosi, M. ;
Berzina, T. ;
Buffagni, E. ;
Ferrari, C. ;
Fornari, R. .
JOURNAL OF CRYSTAL GROWTH, 2016, 443 :25-30
[6]   Tin-assisted growth of ε-Ga2O3 film and the fabrication of photodetectors on sapphire substrate by PLD [J].
Cai, Yuncong ;
Zhang, Ke ;
Feng, Qian ;
Zuo, Yan ;
Hu, Zhuangzhuang ;
Feng, Zhaoqing ;
Zhou, Hong ;
Lu, Xiaoli ;
Zhang, Chunfu ;
Tang, Weihua ;
Zhang, Jincheng ;
Hao, Yue .
OPTICAL MATERIALS EXPRESS, 2018, 8 (11) :3506-3517
[7]   Growth Pressure Controlled Nucleation Epitaxy of Pure Phase ε- and β-Ga2O3 Films on Al2O3 via Metal-Organic Chemical Vapor Deposition [J].
Chen, Yuanpeng ;
Xia, Xiaochuan ;
Liang, Hongwei ;
Abbas, Qasim ;
Liu, Yang ;
Du, Guotong .
CRYSTAL GROWTH & DESIGN, 2018, 18 (02) :1147-1154
[8]   The real structure of ε-Ga2O3 and its relation to κ-phase [J].
Cora, Ildiko ;
Mezzadri, Francesco ;
Boschi, Francesco ;
Bosi, Matteo ;
Caplovicova, Maria ;
Calestani, Gianluca ;
Dodony, Istvan ;
Pecz, Bela ;
Fornari, Roberto .
CRYSTENGCOMM, 2017, 19 (11) :1509-1516
[9]  
Fewster PaulF., 2003, XRAY SCATTERING SEMI, V2nd
[10]   Thermal stability of ε-Ga2O3 polymorph [J].
Fornari, R. ;
Pavesi, M. ;
Montedoro, V. ;
Klimm, D. ;
Mezzadri, F. ;
Cora, I. ;
Pecz, B. ;
Boschi, F. ;
Parisini, A. ;
Baraldi, A. ;
Ferrari, C. ;
Gombia, E. ;
Bosi, M. .
ACTA MATERIALIA, 2017, 140 :411-416