Feature-based characterization and extraction of ripple errors over the large square aperture

被引:5
作者
Fei, Wenhui [1 ]
Zhao, Lei [1 ]
Bai, Jian [1 ]
Zhou, Xiangdong [1 ]
Hou, Jing [2 ]
Yan, Hao [2 ]
Wang, Kaiwei [1 ]
机构
[1] Zhejiang Univ, State Key Lab Modern Opt Instrumentat, Hangzhou 310027, Peoples R China
[2] China Acad Engn Phys, Res Ctr Laser Fus, Mianyang 621900, Sichuan, Peoples R China
关键词
FREQUENCY SURFACE ERRORS; SPATIAL FREQUENCIES; FREEFORM; FABRICATION; POLYNOMIALS; TOLERANCE; DENSITY; ROBUST;
D O I
10.1364/OE.418491
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Freeform surfaces play an important role in modern optical systems with compactness and better performance. The fabrication tools tend to impart a structured signature on optical surfaces, called ripple errors, during the freeform surface manufacturing process. The description and extraction of ripple errors for freeform surface fabrication and testing have attracted extensive attention. In this paper, we develop a fast and accurate method to describe ripple errors for the large aperture based on Fourier model coupling. The polynomial expression is transformed into Fourier series formand surface errors are reconstructed by frequency feature extraction combining with the least square method. The high accuracy and efficiency of the proposed method for representing and filtering ripple errors consuming little computer memory are demonstrated using real experimental data. The proposed method offers a robust and powerful tool not only suitable for surface error characterization but also for image filtering and analysis. (C) 2021 Optical Society of America under the terms of the OSA Open Access Publishing Agreement
引用
收藏
页码:8296 / 8311
页数:16
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