Sinusoidal phase-modulating laser diode interferometer for measuring angular displacement

被引：12

作者：

Zhang, C ^{[1
]}

Wang, XZ ^{[1
]}

机构：

[1] Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Informat Opt Lab, Shanghai 201800, Peoples R China

来源：

OPTICAL ENGINEERING | 2004年 / 43卷 / 12期

关键词：

angular displacement measurement; Fabry-Perot plate; sinusoidal phase-modulating interferometry; charge-coupled device image sensor;

D O I：

10.1117/1.1810141

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We propose a sinusoidal phase-modulating laser diode interferometer for measuring small angular displacement. The interferometer is based on a Fabry-Perot plate. It has a simple structure and is insensitive to external disturbance. Sinusoidal phase-modulating interferometry is used for improving the measurement accuracy. A charge-coupled device (CCD) image sensor is used for measuring the distance between the reflected beams from two faces of the Fabry-Perot plate. From the distance, the initial angle of incidence is calculated. Compared with Michelson interferometers and autocollimators, this interferometer has the advantage of compact size and simple structure. The numerical calculation and experimental results verify the usefulness of this novel interferometer. (C) 2004 Society of Photo-Optical Instrumentation Engineers.

引用

页码：3008 / 3013

页数：6

共 14 条

[1] Angle measurement using total-internal-reflection heterodyne interferometry [J].