Mechanical properties of amorphous and crystalline CrN/CrAlSiN multilayer coating fabricated using HPPMS

被引：18

作者：

Chang, Chi-Lung ^{[1
,2
]}

Huang, Chun-Hong ^{[1
]}

Lin, Ching-Yen ^{[1
]}

Yang, Fu-Chi ^{[2
]}

Tang, Jian-Fu ^{[3
]}

机构：

[1] Ming Chi Univ Technol, Dept Mat Engn, New Taipei City, Taiwan

[2] Ming Chi Univ Technol, Ctr Plasma & Thin Film Technol, New Taipei City, Taiwan

[3] Natl Taipei Univ Technol, Dept Electro Opt Engn, Taipei City, Taiwan

来源：

SURFACES AND INTERFACES | 2022年 / 31卷

关键词：

HPPMS; Nitrogen flow; Multilayer coatings; Amorphous; Bipolar; AR/N-2 FLOW RATIO; WORK TOOL STEELS; TRIBOLOGICAL PROPERTIES; HIGH-TEMPERATURE; CRALN COATINGS; GRAIN-SIZE; CRN; ALCRN; MICROSTRUCTURE; RESISTANCE;

D O I：

10.1016/j.surfin.2022.102064

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

In this study, CrN/CrAlSiN multilayer coatings were prepared on Si wafer, high-speed steel and 304 stainless steel substrates via high-power pulsed magnetron sputtering with targets of metallurgical Cr30Al60Si10 and Cr. The structural characteristics of the coatings were modulated by performing deposition under a fixed rotation speed while varying the nitrogen-argon flow ratio. FE-SEM revealed that increasing the nitrogen content decreased the grain size and thickness of the coatings. GIXRD analysis revealed that the crystallinity of the multilayer changed from an amorphous phase to crystalline structures as a function of N2 gas flow conditions. Improvements were exhibited in the hardness (from 13.3 to 26.8 GPa) and Young's modulus (from 261 to 402.2 GPa) with a period of modulation of 12 nm and crystal transformations. The adhesion strength of the multilayer improved from 17.2 to 66.6 N.

引用

页数：8

共 54 条

[1] Tutorial: Reactive high power impulse magnetron sputtering (R-HiPIMS)
Anders, Andre
[J]. JOURNAL OF APPLIED PHYSICS, 2017, 121 (17)
[2] Effect of periodicity on hardness and scratch resistance of CrN/NbN nanoscale multilayer coating deposited by cathodic arc technique
Araujo, Juliano Avelar
Araujo, Gisela Marques
Souza, Roberto Martins
Tschiptschin, Andre Paulo
[J]. WEAR, 2015, 330 : 469 - 477
[3] Deformation and Cracking Mechanism in CrN/TiN Multilayer Coatings
Azizpour, Ahmad
Hahn, Rainer
Klimashin, Fedor F.
Wojcik, Tomasz
Poursaeidi, Esmaeil
Mayrhofer, Paul Heinz
[J]. COATINGS, 2019, 9 (06):
[4] Improved adhesion of carbon nitride coatings on steel substrates using metal HiPIMS pretreatments
Bakoglidis, Konstantinos D.
Schmidt, Susann
Greczynski, Grzegorz
Hultman, Lars
[J]. SURFACE & COATINGS TECHNOLOGY, 2016, 302 : 454 - 462
[5] Sliding wear of CrN, AlCrN and AlTiN coated AISI H13 hot work tool steels in aluminium extrusion
Birol, Yucel
[J]. TRIBOLOGY INTERNATIONAL, 2013, 57 : 101 - 106
[6] Wear behavior of Cr1-xAlxNPVD-coatings in dry running conditions
Bobzin, K.
Lugscheider, E.
Nickel, R.
Bagcivan, N.
Kraemer, A.
[J]. WEAR, 2007, 263 : 1274 - 1280
[7] Enhancement of mechanical and tribological properties in AISI D3 steel substrates by using a non-isostructural CrN/AlN multilayer coating
Cabrera, G.
Caicedo, J. C.
Amaya, C.
Yate, L.
Munoz Saldana, J.
Prieto, P.
[J]. MATERIALS CHEMISTRY AND PHYSICS, 2011, 125 (03) : 576 - 586
[8] Microstructure and Corrosion Behavior of CrN and CrSiCN Coatings
Cai, Feng
Yang, Qi
Huang, Xiao
Wei, Ronghua
[J]. JOURNAL OF MATERIALS ENGINEERING AND PERFORMANCE, 2010, 19 (05) : 721 - 727
[9] Texture, microstructure and anti-wear characteristics in isostructural CrAlSiN/W2N multilayer coatings
Chan, Yu-Chen
Chen, Hsien-Wei
Tsai, Yan-Zuo
Duh, Jenq-Gong
Lee, Jyh-Wei
[J]. THIN SOLID FILMS, 2013, 544 : 265 - 269
[10] Duplex coating technique to improve the adhesion and tribological properties of CrAlSiN nanocomposite coating
Chang, Chun-Chi
Duh, Jenq-Gong
[J]. SURFACE & COATINGS TECHNOLOGY, 2017, 326 : 375 - 381

← 1 2 3 4 5 6 →