Preparation and characterization of cerium (IV) oxide thin films by spray prolysis method

被引：36

作者：

Wang, SY ^{[1
]}

Wang, W

Liu, QC

Zhang, M

Qian, YT

机构：

[1] Nanjing Univ, Dept Phys, Nanjing 210093, Peoples R China

[2] Univ Sci & Technol China, Dept Chem, Anhua 230026, Peoples R China

来源：

SOLID STATE IONICS | 2000年 / 133卷 / 3-4期

关键词：

cerium oxide; spray pyrolysis; thin films; crystallinity;

D O I：

10.1016/S0167-2738(00)00762-1

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Cerium (IV) oxide films were deposited on silicon substrates by nebulization of a 0.01 M solution of cerium acetylacetonate in a 50% ethanol-water mixture followed by pyrolysis in flowing air. The films were characterized by X-ray diffraction, scanning electron microscopy and atomic force microscopy. On the basis of the experimental evidence, the technical conditions were selected. Appropriate control of the ratio of pulse time to interval time was found to be necessary for obtaining high quality and greater crystallite size cerium (IV) oxide thin films. (C) 2000 Published by Elsevier Science B.V.

引用

页码：211 / 215

页数：5

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