The Manufacturing of a Metallic Nano-Cluster at a Tip Apex for Field-Sensitive Microscopy Applications

被引:4
作者
Lin, Hung-Min [1 ]
Chang, Mao-Nan [1 ]
Lin, Yue-Sheng [2 ]
Cheng, Chao-Chia [3 ]
机构
[1] Natl Nano Device Labs, Div Nano Metrol, Hsinchu 30078, Taiwan
[2] Chung Hua Univ, Dept Elect Engn, Hsinchu 30012, Taiwan
[3] Natl Cent Univ, Dept Phys, Tao Yuan 32001, Taiwan
关键词
Field-Sensitive; SPM; Nano-Cluster; SPREADING RESISTANCE MICROSCOPY; NANOMETER-SCALE; FORCE; CHARGE; PHOTOIONIZATION; RESOLUTION;
D O I
10.1166/jnn.2010.2372
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
Using a conductive atomic force microscopic setup, a metallic nano-cluster at a tip apex was successfully manufactured by an electrochemical redox process from an anodic aluminum oxide template. The diameter of the metallic nano-clusters ranged from 15 nm to 200 nm. The diameters of the nano-clusters could be well-controlled by adjusting the pore size of the templates. The formation of a variety of metallic nano-clusters at the tip apex was accomplished by preparing the electrolyte solution from different metallic salts. The formation mechanism for the nano-cluster is outlined and discussed. Moreover, we were able to enhance the performance of the nano-cluster tips for field-sensitive scanning probe microscopy, including electrostatic force microscopy and scanning Kelvin probe microscopy by laser annealing. Our experimental results indicated that for applications in field-sensitive scanning probe microscopy the stray field effect was significantly suppressed by the nano-cluster tip and hence the spatial resolution was improved.
引用
收藏
页码:4459 / 4464
页数:6
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