Structural, surface morphology and optical properties of sputter-coated CaCu3Ti4O12 thin film: Influence of RF magnetron sputtering power

被引：57

作者：

Ahmadipour, Mohsen ^{[1
]}

Ayub, Siti Nursalma ^{[1
]}

Ain, Mohd Fadzil ^{[2
]}

Ahmad, Zainal Arifin ^{[1
]}

机构：

[1] Univ Sains Malaysia, Sch Mat & Mineral Resources Engn, Struct Mat Niche Area, Engn Campus, Nibong Tebal 14300, Penang, Malaysia

[2] Univ Sains Malaysia, Sch Elect & Elect Engn, Engn Campus, Nibong Tebal 14300, Penang, Malaysia

来源：

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING | 2017年 / 66卷

关键词：

CaCu3Ti4O12 thin films; RF magnetron sputtering; Optical properties; DIELECTRIC-PROPERTIES;

D O I：

10.1016/j.mssp.2017.04.019

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This study focusses on the investigation of RF power variations (100-300 W) effects on structural, morphological and optical properties of CaCu3Ti4O12 thin film deposited on ITO/glass substrate in a non-reactive atmosphere (Ar). The increase of RF power from 100 W to 300 W led to evolution of (112), (022), (033), and (224) of CCTO XRD peaks. The results indicated that all the films were polycrystalline nature with cubic structure. The crystallite size increased from 20 nm to 25 nm with increasing RF power. FESEM revealed that the films deposited were uniform, porous with granular form, while the grain size increased from 30 to 50 nm. AFM analysis confirmed the increment in surface roughness from 1.6 to 2.3 nm with increasing film grain size. Besides, optical transmittance values decreased to minimum 70% with increasing RF power while optical energy bandgap increased from 3.20 eV to 3.44 eV. Therefore, favorable CCTO thin film properties can be possibly obtained for certain application by controlling RF magnetron sputtering power.

引用

页码：157 / 161

页数：5

共 23 条

[1] A Short Review on Copper Calcium Titanate (CCTO) Electroceramic: Synthesis, Dielectric Properties, Film Deposition, and Sensing Application [J].