Optical transmittance study of the thermal decomposition of sputtered Pt-Ag-O films

被引:16
作者
Shima, T [1 ]
Tominaga, J [1 ]
机构
[1] Natl Inst Adv Ind Sci & Technol, Lab Adv Opt Technol, Tsukuba, Ibaraki 3058562, Japan
关键词
transmittance; thermal decomposition; X-ray fluorescence;
D O I
10.1016/S0040-6090(02)01305-6
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Platinum was doped into Ag-O to prepare Pt-Ag-O (Pt composition: 1-5 at.%) film, and its thermal decomposition process was studied by measuring the change in transmitted light intensity while heating the film to 600 degreesC. X-ray fluorescence spectroscopy was used to evaluate the oxygen loss up to 260 degrees. When 1 at.% Pt was doped, the AgO to Ag2O decomposition process at 130-160 degreesC became less evident. When Pt composition was further increased, oxygen loss was somewhat suppressed, at least up to 260 degreesC, and a slight degree of Pt-O thermal decomposition became noticeable at approximately 550 degreesC. Platinum doping effectively modified the Ag-O thermal decomposition process, and giving it potential for use as a temperature control for plasmon-related techniques activated by the generation of Ag particles. (C) 2002 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:31 / 34
页数:4
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