Etching depth dependence of the effective refractive index in two-dimensional photonic-crystal-patterned vertical-cavity surface-emitting laser structures

被引:92
作者
Yokouchi, N [1 ]
Danner, AJ [1 ]
Choquette, KD [1 ]
机构
[1] Univ Illinois, Micro & Nanotechnol Lab, Urbana, IL 61801 USA
关键词
D O I
10.1063/1.1556562
中图分类号
O59 [应用物理学];
学科分类号
摘要
A vertical-cavity surface-emitting laser (VCSEL) having a two-dimensional (2-D) photonic crystal structure on its surface has been investigated for single-lateral-mode operation. We evaluated the effective index change of a VCSEL cavity introduced by a 2-D pattern. Our experimental results showed good agreement with a theoretical model in which the influence of a finite etching depth was taken into consideration. The etching-depth dependence parameter gamma, which can be explained by the optical power distribution inside a VCSEL structure, will be helpful for controlling the lateral mode of VCSEL devices. (C) 2003 American Institute of Physics.
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页码:1344 / 1346
页数:3
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