A Three-Dimensional Reconstruction Algorithm for Scanning Transmission Electron Microscopy Data from a Single Sample Orientation

被引：9

作者：

Brown, Hamish G. ^{[1
,10
]}

Pelz, Philipp M. ^{[1
,2
]}

Hsu, Shang-Lin ^{[1
,2
]}

Zhang, Zimeng ^{[2
]}

Ramesh, Ramamoorthy ^{[2
,3
]}

Inzani, Katherine ^{[4
,5
]}

Sheridan, Evan ^{[4
,5
,6
]}

Griffin, Sinead M. ^{[4
,5
]}

Schloz, Marcel ^{[7
]}

Pekin, Thomas C. ^{[7
]}

Koch, Christoph T. ^{[7
]}

Findlay, Scott D. ^{[8
]}

Allen, Leslie J. ^{[9
]}

Scott, Mary C. ^{[1
,2
]}

Ophus, Colin ^{[1
]}

Ciston, Jim ^{[1
]}

机构：

[1] Lawrence Berkeley Natl Lab, Natl Ctr Elect Microscopy Facil, Mol Foundry, Berkeley, CA 94720 USA

[2] Univ Calif Berkeley, Dept Mat Sci & Engn, Berkeley, CA 94720 USA

[3] Univ Calif Berkeley, Dept Phys, Berkeley, CA 94720 USA

[4] Lawrence Berkeley Natl Lab, Div Mat Sci, Berkeley, CA 94720 USA

[5] Lawrence Berkeley Natl Lab, Mol Foundry, Berkeley, CA 94720 USA

[6] Kings Coll London, Dept Phys, Theory & Simulat Condensed Matter, London WC2R 2LS, England

[7] Humboldt Univ, Dept Phys IRIS Adlershof, Newtonstr 15, D-12489 Berlin, Germany

[8] Monash Univ, Sch Phys & Astron, Clayton, Vic 3800, Australia

[9] Univ Melbourne, Sch Phys, Parkville, Vic 3010, Australia

[10] Univ Melbourne, Bio21 Mol Sci & Biotechnol Inst, Ian Holmes Imaging Ctr, Parkville, Vic 3052, Australia

来源：

MICROSCOPY AND MICROANALYSIS | 2022年 / 28卷 / 05期

基金：

澳大利亚研究理事会;

关键词：

differential phase contrast; image reconstruction; ptychography; scanning transmission electron microscopy; RESOLUTION; PTYCHOGRAPHY; RETRIEVAL; INVERSION;

D O I：

10.1017/S1431927622012090

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Increasing interest in three-dimensional nanostructures adds impetus to electron microscopy techniques capable of imaging at or below the nanoscale in three dimensions. We present a reconstruction algorithm that takes as input a focal series of four-dimensional scanning transmission electron microscopy (4D-STEM) data. We apply the approach to a lead iridate, PbIrO, and yttrium-stabilized zirconia, YZrO, heterostructure from data acquired with the specimen in a single plan-view orientation, with the epitaxial layers stacked along the beam direction. We demonstrate that Pb-Ir atomic columns are visible in the uppermost layers of the reconstructed volume. We compare this approach to the alternative techniques of depth sectioning using differential phase contrast scanning transmission electron microscopy (DPC-STEM) and multislice ptychographic reconstruction.

引用

页码：1632 / 1640

页数：9

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