Direct-write vapor sensors on FR4 plastic substrates

被引:32
作者
Marinov, Valery R. [1 ]
Atanasov, Yuriy A.
Khan, Adeyl
Vaselaar, Dustin
Halvorsen, Aaron
Schulz, Douglas L.
Chrisey, Douglas B.
机构
[1] N Dakota State Univ, Ctr Nanoscale Sci & Engn, Fargo, ND 58102 USA
[2] Rensselaer Polytech Inst, Dept Mat Sci & Engn, Troy, NY 12180 USA
关键词
Ag; C; composite; direct write; electronic; material; film; polymer; sensor;
D O I
10.1109/JSEN.2007.895964
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Functioning chemiresistor vapor sensing devices on plastic substrates were prepared using low-temperature direct-Xwrite techniques. Interdigitated Ag electrodes were first deposited onto printed circuit boards using a mesoscale maskless materials deposition system (M3D). These Ag lines were 20-50 mu m wide and 8-10 mu m thick with good adhesion to the substrate and electrical conductivity of 4-12 mu Omega.cm. Deposition of chemoselective polymer/C black composite transducer layers on such lines gave sensors that responded to nerve gas stimulant (dimethylmethyl phosphonate) thereby demonstrating the efficacy of direct write for this application. A new approach to localized direct-write deposition, termed Enhanced M3D, allows the formation of sharply defined line edges and enables printing of conductors that operate at radio frequency with low signal loss. The direct-write approaches described here are amenable to future deposition on more interesting substrates and development of more sensitive transducers, orthogonal sensor arrays and an integrated power source/communication platform that might constitute the basis for radio-frequency identification (RFID) sensor tags.
引用
收藏
页码:937 / 944
页数:8
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