The influence of acoustic cavitation to microscopic material removal in polishing process based on vibration of liquid: A numerical study

被引：4

作者：

Guo, Zhongning ^{[1
]}

Huang, Zhigang ^{[1
]}

Chen, Xin ^{[1
]}

机构：

[1] Guangdong Univ Technol, Fac Electromech Engn, Guangzhou 510090, Peoples R China

来源：

ADVANCES IN MATERIALS MANUFACTURING SCIENCE AND TECHNOLOGY II | 2006年 / 532-533卷

基金：

中国国家自然科学基金;

关键词：

polishing; acoustic cavitation; dissipative particle dynamics; micro-jet;

D O I：

10.4028/www.scientific.net/MSF.532-533.301

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Polishing Process based on Vibration of Liquid (PVL), abrasive particles driven by polishing liquid will brush and etch workpiece to achieve material removal. Because the liquid is vibrated in ultrasonic frequency, polishing process will be greatly affected by cavitation phenomenon. The critical thermal conditions and high-speed liquid jet produced by bubble dynamics may damage workpiece. A refined Dissipative Particle Dynamics method is applied to study the effect of acoustic cavitation on PVL. Validity of the numerical simulation is tested according to experimental results.

引用

页码：301 / +

页数：2

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