Mode Transition in an Inductively Coupled Argon-Mercury Mixture Discharge Studied by Interferometer and Optical Emission Spectroscopy

被引：2

作者：

Zhang, Zhongkai ^{[1
]}

Zhang, Xiao ^{[1
]}

Cao, Jinxiang ^{[1
]}

Liu, Yu ^{[2
]}

Wang, Pi ^{[1
]}

Yu, Pengcheng ^{[1
]}

机构：

[1] Univ Sci & Technol China, Modern Phys Dept, CAS Key Lab Geospace Environm, Hefei 230026, Anhui, Peoples R China

[2] Univ Sci & Technol China, Sch Earth & Space Sci, CAS Key Lab Geospace Environm, Hefei 230026, Anhui, Peoples R China

来源：

IEEE TRANSACTIONS ON PLASMA SCIENCE | 2018年 / 46卷 / 09期

基金：

中国国家自然科学基金;

关键词：

Ar-Hg mixture discharge; inductively coupled plasma (ICP); interferometry; mode transition; optical emission; ELECTRON-IMPACT EXCITATION; CROSS-SECTIONS; H TRANSITION; PLASMA; GAS; IONIZATION;

D O I：

10.1109/TPS.2017.2780919

中图分类号：

O35 [流体力学]; O53 [等离子体物理学];

学科分类号：

070204 ; 080103 ; 080704 ;

摘要：

The E-H-mode-transition process in an inductively coupled argon-mercury mixture discharge plasma was investigated by an interferometer and a spectrometer. The transition powers upon different natural pressures and mercury content were studied. The electron density versus input power under several discharge conditions in the E mode and H mode was measured detailedly by the interferometer. These results suggested that the nonlinear effects of power absorption and dissipation play a significant role in the mode transition process. In addition, the optical emission system was employed to obtain the intensity ratios of spectral lines at different mercury proportions, which shed light on the mechanism of stepwise ionization and the variability of H-to-E-mode-transition powers in the argon-mercury mixture discharge.

引用

页码：3151 / 3158

页数：8

共 38 条

[1] HIGH-DENSITY PLASMA MODE OF AN INDUCTIVELY COUPLED RADIO-FREQUENCY DISCHARGE [J].