Acoustic properties of alumina colloidal/polymer nano-composite film on silicon

被引:17
作者
Zhang, Rui
Cao, Wenwu [1 ]
Zhou, Qifa
Cha, Jung Hyui
Shung, K. Kirk
Huang, Yuhong
机构
[1] Harbin Inst Technol, Dept Phys, Harbin, Heilongjiang, Peoples R China
[2] Penn State Univ, Mat Res Inst, University Pk, PA 16802 USA
[3] Univ So Calif, Dept Biomed Engn, Los Angeles, CA 90089 USA
[4] Univ So Calif, NIH Transducer Resource Ctr, Los Angeles, CA 90089 USA
[5] Chemat Technol Inc, Northridge, CA 91324 USA
关键词
D O I
10.1109/TUFFC.2007.270
中图分类号
O42 [声学];
学科分类号
070206 ; 082403 ;
摘要
Alumina colloidal/polymer composite films on silicon substrates have been successfully fabricated using the sol-gel method, in which the crystallite sizes of alumina are between 20 and 50 nm. The density and ultrasonic phase velocities in these films with different alumina ratios from 14% to 32% were measured at the desired operating frequency. We have proved that the density, acoustic phase velocities, and hence the acoustic impedance of the nanocomposite films increase with the alumina content, which gives us another option of tailoring the acoustic impedance of the nano-composite film for making the matching layer of high-frequency medical ultrasonic transducers.
引用
收藏
页码:467 / 469
页数:3
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