Microfabricated probes for near-field optical microscopy

被引：0

作者：

Heinzelmann, H ^{[1
]}

Eckert, R ^{[1
]}

Freyland, JM ^{[1
]}

Gersen, H ^{[1
]}

Schürmann, G ^{[1
]}

Noell, W ^{[1
]}

Staufer, U ^{[1
]}

de Rooij, N ^{[1
]}

机构：

[1] Ctr Suisse Elect & Microtech SA, Nanoscale Technol, Neuchatel, Switzerland

来源：

2000 IEEE/LEOS INTERNATIONAL CONFERENCE ON OPTICAL MEMS | 2000年

关键词：

D O I：

10.1109/OMEMS.2000.879658

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Microfabrication of probes for near-field optical microscopy is a promising approach to improve probe quality, reproducibility, and availability/cost. We report on cantilevered probes with integrated quartz tips allowing near-field optical imaging of single fluorophores with 32 nm lateral resolution.

引用

页码：127 / 128

页数：2

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