Microfabricated probes for near-field optical microscopy

被引：0
|
作者：
Heinzelmann, H [1 ]
Eckert, R [1 ]
Freyland, JM [1 ]
Gersen, H [1 ]
Schürmann, G [1 ]
Noell, W [1 ]
Staufer, U [1 ]
de Rooij, N [1 ]
机构：
[1] Ctr Suisse Elect & Microtech SA, Nanoscale Technol, Neuchatel, Switzerland
来源：
2000 IEEE/LEOS INTERNATIONAL CONFERENCE ON OPTICAL MEMS | 2000年
关键词：
D O I：
10.1109/OMEMS.2000.879658
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Microfabrication of probes for near-field optical microscopy is a promising approach to improve probe quality, reproducibility, and availability/cost. We report on cantilevered probes with integrated quartz tips allowing near-field optical imaging of single fluorophores with 32 nm lateral resolution.
引用
收藏
页码：127 / 128
页数：2
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