FIB-based technique for stress characterization on thin films for reliability purposes

被引：29
作者：
Sabate, N.
Vogel, D.
Keller, J.
Gollhardt, A.
Marcos, J.
Gracia, I.
Cane, C.
Michel, B.
机构：
[1] Ctr Nacl Microelect, Bellaterra 08193, Spain
[2] IZM, Micro Mat Ctr Berlin, Franhofer Inst Reliabil & Microintegrat, D-13355 Berlin, Germany
来源：
MICROELECTRONIC ENGINEERING | 2007年 / 84卷 / 5-8期
关键词：
residual stress; hole-drilling method; slot milling; focused ion beam;
D O I：
10.1016/j.mee.2007.01.272
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper describes a novel approach of stress measurement based on the combined imaging-milling capabilities of a FIB equipment. This technique consists on the scaling down of two measurement techniques based on stress-relaxation, the slot and the hole-drilling methods. The main aspects of both approaches at a microscale are described and illustrated and some examples of their application to thin films are presented. (c) 2007 Elsevier B.V. All rights reserved.
引用
收藏
页码：1783 / 1787
页数：5
相关论文
共 13 条
  • [1] [Anonymous], 2002, APPL MECH REV
  • [2] ASTM, E837 ASTM
  • [3] CRACKING OF THIN BONDED FILMS IN RESIDUAL TENSION
    BEUTH, JL
    [J]. INTERNATIONAL JOURNAL OF SOLIDS AND STRUCTURES, 1992, 29 (13) : 1657 - 1675
  • [4] CHEN CW, 2000, P SOC PHOTO-OPT INS, V1, P113
  • [5] A SIMPLE TECHNIQUE FOR THE DETERMINATION OF MECHANICAL STRAIN IN THIN-FILMS WITH APPLICATIONS TO POLYSILICON
    GUCKEL, H
    RANDAZZO, T
    BURNS, DW
    [J]. JOURNAL OF APPLIED PHYSICS, 1985, 57 (05) : 1671 - 1675
  • [6] A method for in situ measurement of the residual stress in thin films by using the focused ion beam
    Kang, KJ
    Yao, N
    He, MY
    Evans, AG
    [J]. THIN SOLID FILMS, 2003, 443 (1-2) : 71 - 77
  • [7] KANG KJ, 2004, J ENG MAT TECHNOLOGY, P457
  • [8] Prime M.B., 1999, APPL MECH REV, V52, P75, DOI [10.1115/1.3098926, DOI 10.1115/1.3098926]
  • [9] Digital image correlation of nanoscale deformation fields for local stress measurement in thin films
    Sabate, N.
    Vogel, D.
    Gollhardt, A.
    Marcos, J.
    Gracia, I.
    Cane, C.
    Michel, B.
    [J]. NANOTECHNOLOGY, 2006, 17 (20) : 5264 - 5270
  • [10] SABATE N, J MICROMECHANICS MIC, V16, P254
12