Influence of Deposition Temperature on Microstructures and Mechanical Properties of the Al-Cr-Si-N Coatings Deposited by HiPIMS Technique

被引：0
|
作者：
Wang Tiegang [1 ]
Li Baisong [1 ]
Zhang Jiaojiao [1 ]
Tang Kuanyu [1 ]
Liu Yanmei [1 ]
Jiang Sumeng [2 ]
机构：
[1] Tianjin Univ Technol & Educ, Tianjin Key Lab High Speed Cutting & Precis Mfg, Tianjin 300222, Peoples R China
[2] Chinese Acad Sci, Inst Met Res, Shenyang 110016, Liaoning, Peoples R China
来源：
RARE METAL MATERIALS AND ENGINEERING | 2018年 / 47卷 / 08期
关键词：
HiPIMS; Al-Cr-Si-N coating; deposition temperature; mechanical property; friction coefficient; THIN-FILMS; TRIBOLOGICAL PROPERTIES; CUTTING TOOLS; BIAS VOLTAGE; O-N; ARC; SYSTEM; ALLOY;
D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Al-Cr-Si-N coating was prepared by high power pulsed magnetron sputtering (HiPIMS) technique at different deposition temperatures. The effects of deposition temperature on the composition, microstructure, mechanical properties and tribological properties of the coatings were investigated. The results show that as the deposition temperature rises from 100 degrees C to 350 degrees C, the microstructure of the coating begins to evolve from amorphous to nanocrystals, and the fcc-AlN phase appears at 300 degrees C. The smoothness and compactness of the coating are progressively improved. The adhesive strength increases gradually, reaches the maximum value of 77 N at 300 degrees C and sharply decreases to 25 N at 350 degrees C due to the serious glow etching effect. The hardness of the coating increases gradually and reaches a maximum of 19.4 GPa at 350 degrees C. No columnar crystals are found and the residual stress decreases from -0.8 GPa to about -0.4 GPa.
引用
收藏
页码：2578 / 2584
页数：7
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