Surface coating of small SiO2 particles with a WO3 thin film by barrel-sputtering method

被引:15
作者
Abe, Takayuki [1 ]
Hamatani, Hiromi [1 ]
Higashide, Shingo [1 ]
Hara, Masanori [1 ]
Akamaru, Satoshi [1 ]
机构
[1] Toyama Univ, Hydrogen Isotope Res Ctr, Toyama 930, Japan
关键词
barrel-sputtering method; WO3; surface coating; powdery materials;
D O I
10.1016/j.jallcom.2006.07.132
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Surface coating of small SiO2 flakes with a WO3 thin film was carried out by using a hexagonal-barrel-sputtering method. In order to find suitable sputtering conditions using this method, the WO3 film was coated on the glass plate by reactive sputtering under desired total pressures, oxygen fractions, and substrate temperatures. By the analysis of XRD patterns, the suitable conditions prepared for the WO3 film were determined to be a total pressure of 0.6 Pa, an oxygen fraction of 35% and 648 K. Surface coating of SiO2 particles by WO3 film was carried out under the conditions. It was found from SEM and EDS measurements that the surface of SiO2 particles was coated with a thin uniform WO3 film. (C) 2006 Elsevier B.V. All rights reserved.
引用
收藏
页码:157 / 161
页数:5
相关论文
共 14 条
[1]   Surface modification of polymer microparticles using a hexagonal-barrel sputtering system [J].
Abe, T ;
Akamaru, S ;
Watanabe, K ;
Honda, Y .
JOURNAL OF ALLOYS AND COMPOUNDS, 2005, 402 (1-2) :227-232
[2]   Surface modification of Al2O3 ceramic grains using a new RF sputtering system developed for powdery materials [J].
Abe, T ;
Akamaru, S ;
Watanabe, K .
JOURNAL OF ALLOYS AND COMPOUNDS, 2004, 377 (1-2) :194-201
[3]  
CAIRNS JA, 1976, Patent No. 1455248
[4]   Noble metal deposition on aluminum oxide powder surfaces by ion beam sputtering [J].
Ensinger, W ;
Muller, HR .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1998, 141 (1-4) :693-698
[5]   Hydrogen absorption by Pd-coated ZrNi prepared by using Barrel-Sputtering System [J].
Hara, M ;
Hatano, Y ;
Abe, T ;
Watanabe, K ;
Naitoh, T ;
Ikeno, S ;
Honda, Y .
JOURNAL OF NUCLEAR MATERIALS, 2003, 320 (03) :265-271
[6]  
IINOYA K, 1991, POWDER TECHNOLOGY HD
[7]   Encapsulation of abrasive particles by plasma CVD [J].
Karches, M ;
Morstein, M ;
von Rohr, PR .
SURFACE & COATINGS TECHNOLOGY, 2003, 169 :544-548
[8]   Development of silica coating methods for powdered pigments with atmospheric pressure glow plasma [J].
Mori, T ;
Tanaka, K ;
Inomata, T ;
Takeda, A ;
Kogoma, M .
THIN SOLID FILMS, 1998, 316 (1-2) :89-92
[9]   A NEW APPROACH TO ION-BEAM MODIFICATION OF POWDERS [J].
MULLER, HR ;
ENSINGER, W ;
FRECH, G ;
WOLF, GK .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1994, 89 (1-4) :357-361
[10]   Synthesis of engineered particulates with tailored properties using dry particle coating [J].
Pfeffer, R ;
Dave, RN ;
Wei, DG ;
Ramlakhan, M .
POWDER TECHNOLOGY, 2001, 117 (1-2) :40-67