Characterization of trace embedded impurities in thin multilayer structures using synchrotron X-ray standing waves

被引：8

作者：

Tiwari, M. K. ^{[1
,2
]}

Sawhney, K. J. S. ^{[1
]}

Lodha, G. S. ^{[2
]}

机构：

[1] Diamond Light Source Ltd, Didcot OX11 0DE, Oxon, England

[2] Raja Ramanna Ctr Adv Technol, Indus Synchrotron Utilizat Div, Indore 452013, Madhya Pradesh, India

来源：

SURFACE AND INTERFACE ANALYSIS | 2010年 / 42卷 / 02期

关键词：

X-ray multilayers; X-ray standing wave; X-ray fluorescence; atomic impurities; synchrotron radiation; GIANT MAGNETORESISTANCE; SPUTTERING YIELDS; LAYERED MATERIALS; FLUORESCENCE; SPECTROMETRY; RADIATION; SURFACE;

D O I：

10.1002/sia.3178

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

X-ray standing wave (XSW) field generated under Bragg reflection condition in a periodic Mo/Si multilayer structure has been used to determine the concentration and location of various trace element contaminants embedded in different layers of that multilayer structure. We have used intense synchrotron X rays for XSW analysis. It is observed that various trace element impurities such as Cr, Fe, Ni and W get embedded unintentionally in the multilayer structure during the deposition process. Consequences of such impurity incorporation on the optical properties of the multilayer structure are discussed in hard and soft X-ray regions. Present measurements are important in order to optimize the deposition methods on one hand and to better correlate the measured optical properties of a multilayer structure with theoretical models on the other. Copyright (C) 2010 John Wiley & Sons, Ltd.

引用

页码：110 / 116

页数：7

共 50 条

[1] X-ray standing wave and reflectometric characterization of multilayer structures
Ghose, SK
Dev, BN
PHYSICAL REVIEW B, 2001, 63 (24)
[2] Interface roughness and density characterization of multilayer mirrors by using x-ray standing waves
Kawamura, T
Takenaka, H
Hayashi, T
JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA, 1996, 80 : 449 - 452
[3] Interface roughness and density characterization of multilayer mirrors by using x-ray standing waves
J Electron Spectrosc Relat Phenom, (449):
[4] Synchrotron radiation induced X-ray standing waves analysis of layered structures
Kraemer, M.
von Bohlen, A.
Sternemann, C.
Paulus, M.
Hergenroeder, R.
APPLIED SURFACE SCIENCE, 2007, 253 (07) : 3533 - 3542
[5] Magnetism of impurities probed with X-ray standing waves
Jaouen, N.
Whilhelm, F.
Rogalev, A.
Goulon, J.
SYNCHROTRON RADIATION INSTRUMENTATION, PTS 1 AND 2, 2007, 879 : 1707 - +
[6] Interface roughness characterization using x-ray standing waves
1600, American Inst of Physics, Woodbury, NY, USA (75):
[7] INTERFACE ROUGHNESS CHARACTERIZATION USING X-RAY STANDING WAVES
KAWAMURA, T
TAKENAKA, H
JOURNAL OF APPLIED PHYSICS, 1994, 75 (08) : 3806 - 3809
[8] CHARACTERIZATION OF MULTILAYERS AND THIN FILMS BY HIGH RESOLUTION X-RAY DIFFRACTION AND X-RAY STANDING WAVES
Kovalchuk, Mikhail
Zheludeva, Svetlana
Shubnikov, A. V.
ACTA CRYSTALLOGRAPHICA A-FOUNDATION AND ADVANCES, 1996, 52 : C394 - C394
[9] Probing multilayer spintronic structures with photoelectron and x-ray emission spectroscopies excited by x-ray standing waves (invited)
Yang, S. -H.
Sell, B. C.
Fadley, C. S.
JOURNAL OF APPLIED PHYSICS, 2008, 103 (07)
[10] Trace element characterization using a synchrotron radiation X-ray microprobe
Hayakawa, S
BUNSEKI KAGAKU, 1996, 45 (02) : 125 - 134

← 1 2 3 4 5 →