Growth, structure and conductivity of epitaxial thin films of CaCuO2 (CCO) on SrTiO3, LaAlO3 and NdGaO3 substrates were investigated. The films were deposited by pulsed laser ablation from a single stoichiometric target at a pressure of 0.3 mbar and temperatures higher than 700 degreesC. X-ray diffraction reveals that films on (1 1 0)NdGaO3 substrates are single crystals of high quality without twinning and with extremely narrow (less then 0.05degrees) rocking curves. An expansion of the c-axis lattice constant is observed as Sr replaces Ca in CCO films. Transport measurements show that CCO films have a hopping conductivity for all films deposited on all the substrates with a resistivity within the range 10(-1)-10(4) Omega cm. (C) 2004 Elsevier B.V. All rights reserved.