Polymer-based planar waveguide chirped Bragg grating for high-resolution tactile sensing

被引：3

作者：

Lin, Huagang ^{[1
]}

Xing, Yuxin ^{[1
,2
]}

Chen, Xiaolu ^{[3
]}

Zhang, Shuo ^{[1
]}

Forsberg, Erik ^{[1
]}

He, Sailing ^{[1
,2
,4
]}

机构：

[1] Zhejiang Univ, Ctr Opt & Electromagnet Res, State Key Lab Modern Opt Instrumentat, Hangzhou, Peoples R China

[2] Zhejiang Univ, Shanghai Inst Adv Study, Shanghai 201203, Peoples R China

[3] South China Normal Univ, South China Acad Adv Optoelect, Guangzhou, Peoples R China

[4] KTH Royal Inst Technol, Sch Elect Engn, Dept Electromagnet Engn, S-10044 Stockholm, Sweden

来源：

OPTICS EXPRESS | 2022年 / 30卷 / 12期

关键词：

OPTICAL-PROPERTIES; SENSOR;

D O I：

10.1364/OE.460645

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A novel tactile sensor for two-dimensional force location measurements, based on polymer-based planar waveguide chirped Bragg gratings (PPCBGs) fabricated on sheet PMMA substrate, is presented. The planar waveguide and chirped Bragg grating are simultaneously generated using a KrF excimer laser and a phase mask covered by a quartz chrome mask. Location and magnitude of an applied force is measured by observing the change of the wavelength of a dip in the measured spectrum and a change in the reflectivity intensity. Experimental characterization indicates submillimeter spatial resolution of applied force in the range of 1-4 N with a sensitivity of 947.02 pm/mm. (C) 2022 Optica Publishing Group under the terms of the Optica Open Access Publishing Agreement

引用

页码：20871 / 20882

页数：12

共 32 条

[1] An overview on fabrication methods for polymer optical fibers [J].