Pulsed laser deposition BTS thin films: The role of substrate temperature

被引：6

作者：

Chen, Shengtian

Yu, Shihui

Zhang, Bowen

Zhang, Jieling

Ma, Baogang

Liu, Qing

Zhang, Weifeng ^{[1
]}

机构：

[1] Henan Univ, Key Lab Photovolta Mat Henan Prov, Kaifeng 475001, Peoples R China

来源：

CERAMICS INTERNATIONAL | 2016年 / 42卷 / 08期

基金：

中国国家自然科学基金;

关键词：

Films; Grain size; Dielectric properties; Capacitors; ELECTRICAL-PROPERTIES; MICROSTRUCTURE; PB(ZR; TI)O-3; BEHAVIOR;

D O I：

10.1016/j.ceramint.2016.01.190

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

BaSn0.15Ti0.85O3 (BTS) thin films were deposited on Pt/Ti/SiO2/Si(1 0 0) substrate by pulsed laser deposition and the effects of substrate temperature on their structure, dielectric properties and leakage current density were investigated. The results indicate that the substrate temperature has a significant effect on the structural and dielectric properties of the BTS thin films which exhibit a polycrystalline perovskite structure if the substrate temperature ranges within 550-750 degrees C. The dielectric constant and loss tangent of the BTS thin films deposited at 650 degrees C are 341 and 0.009 at 1 MHz, respectively, the tunability is 72.1% at a de bias field of 400 kV/cm, while the largest figure of merit (FOM) is 81.1. The effect of the substrate temperature on the leakage current of the BTS thin films is discussed. (C) 2016 Elsevier Ltd and Techna Group S.r.l. All rights reserved.

引用

收藏

页码：9341 / 9346

页数：6

相关论文

共 35 条

[1] Pulsed laser deposition of lead-free (Na0.5Bi0.5)1-xBaxTiO3 ferroelectric thin films with enhanced dielectric properties [J].

Andrei, A. ;

Scarisoreanu, N. D. ;

Birjega, R. ;

Dinescu, M. ;

Stanciu, G. ;

Craciun, F. ;

Galassi, C. .

APPLIED SURFACE SCIENCE, 2013, 278 :162-165

[2]

Crassous A, 2015, NAT NANOTECHNOL, V10, P614, DOI [10.1038/nnano.2015.114, 10.1038/NNANO.2015.114]

[3] Control of ferroelectric phase transition in nano particulate NBT-BT based ceramics [J].

Devi, Ch. Sameera ;

Kumar, G. S. ;

Prasad, G. .

MATERIALS SCIENCE AND ENGINEERING B-ADVANCED FUNCTIONAL SOLID-STATE MATERIALS, 2013, 178 (05) :283-292

[4] Structural, optical and electrical properties of sol-gel derived (Ba0.6Sr0.4) (NixTi1-x)O3 thin films [J].

Eswaramoorthi, V. ;

Williams, R. Victor .

CERAMICS INTERNATIONAL, 2015, 41 (02) :2434-2438

[5] Modification of microstructure on PZT films for ultrahigh frequency transducer [J].

Fei, Chunlong ;

Chen, Zeyu ;

Fong, Wayne Ming ;

Zhu, Benpeng ;

Wang, Lingyan ;

Ren, Wei ;

Li, Yongxiang ;

Shi, Jing ;

Shung, K. Kirk ;

Zhou, Qifa .

CERAMICS INTERNATIONAL, 2015, 41 :S650-S655

[6] Electrical and dielectric behavior of MgO doped Ba0.7Sr0.3TiO3 thin films on Al2O3 substrate [J].

Lee, SY ;

Tseng, TY .

APPLIED PHYSICS LETTERS, 2002, 80 (10) :1797-1799

[7] Low Temperature Deposition of High Performance Lead Strontium Titanate Thin Films by in situ RF Magnetron Sputtering [J].

Li, Kui ;

Dong, Xianlin ;

Remiens, Denis ;

Lei, Xiuyun ;

Li, Tao ;

Du, Gang ;

Wang, Genshui .

JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 2013, 96 (06) :1682-1684

[8] Enhanced leakage current performance and conduction mechanisms of Bi1.5Zn1.0Nb1.5O7/Ba0.5Sr0.5TiO3 bilayered thin films [J].

Li, Ruguan ;

Jiang, Shuwen ;

Gao, Libin ;

Li, Yanrong .

JOURNAL OF APPLIED PHYSICS, 2012, 112 (07) :2012-10

[9] Composition dependence of ferroelectric and piezoelectric properties of epitaxial (1-x)Ba(Zr0.2Ti0.8)O3-x(Ba0.7Ca0.3)TiO3 thin films prepared by pulsed laser deposition [J].

Lin, Q. R. ;

Wang, D. Y. ;

Luo, B. C. ;

Ding, R. ;

Lorenzen, D. L. ;

Li, S. .

APPLIED SURFACE SCIENCE, 2015, 331 :477-481

[10] Structure, dielectric, ferroelectric, and optical properties of (1-x)Ba(Zr0.2Ti0.8)O3-x(Ba0.7Ca0.3)TiO3 thin films prepared by sol-gel method [J].

Lin, Yanting ;

Wu, Guangheng ;

Qin, Ni ;

Bao, Dinghua .

THIN SOLID FILMS, 2012, 520 (07) :2800-2804

← 1 2 3 4 →