Micro-Ring-Resonator Wavelength-Selective Filter using Highly-Stacked Quantum Dot Intermixed Waveguide

被引：0
|
作者：
Takei, Y. [1 ]
Matsumoto, A. [1 ]
Matsushita, A. [1 ]
Akahane, K. [2 ]
Matsushima, Y. [3 ]
Utaka, K. [1 ]
机构：
[1] Waseda Univ, Fac Sci & Engn, Tokyo, Japan
[2] NICT, Tokyo, Japan
[3] Waseda Univ, Green Comp Syst Res Ctr, Shintoku, Hokkaido, Japan
来源：
26TH INTERNATIONAL CONFERENCE ON INDIUM PHOSPHIDE AND RELATED MATERIALS (IPRM) | 2014年
关键词：
InAs/InGaAlAs; quantum dots; intermixing; PL wavelength; micro-ring-resonator; wavelength-selective-filter;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
We fabricated a double micro-ring-resonator wavelength-selective filter using the waveguide fabricated by the intermixing of InAs/InGaAlAs quantum dots grown on an InP (311)B substrate. Intermixing was done by using ICP-RIE etching and annealing technique at a low temperature of 650 degrees C. The output-power contrasts of the device were 9.0 dB and 8.6 dB for TE and TM modes, respectively.
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页数：2
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