Hard x-ray nanobeam characterization by coherent diffraction microscopy

被引：149

作者：

Schropp, A. ^{[1
]}

Boye, P. ^{[1
]}

Feldkamp, J. M. ^{[1
]}

Hoppe, R. ^{[1
]}

Patommel, J. ^{[1
]}

Samberg, D. ^{[1
]}

Stephan, S. ^{[1
]}

Giewekemeyer, K. ^{[2
]}

Wilke, R. N. ^{[2
]}

Salditt, T. ^{[2
]}

Gulden, J. ^{[3
]}

Mancuso, A. P. ^{[3
]}

Vartanyants, I. A. ^{[3
]}

Weckert, E. ^{[3
]}

Schoeder, S. ^{[4
]}

Burghammer, M. ^{[4
]}

Schroer, C. G. ^{[1
]}

机构：

[1] Tech Univ Dresden, Inst Struct Phys, D-01062 Dresden, Germany

[2] Univ Gottingen, Inst Xray Phys, D-37077 Gottingen, Germany

[3] Deutsch Elektronen Synchrotron DESY, D-22607 Hamburg, Germany

[4] European Synchrotron Radiat Facil, F-38043 Grenoble, France

来源：

APPLIED PHYSICS LETTERS | 2010年 / 96卷 / 09期

关键词：

statistics; X-ray diffraction; X-ray microscopy; PHASE RETRIEVAL; RESOLUTION;

D O I：

10.1063/1.3332591

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We have carried out a ptychographic scanning coherent diffraction imaging experiment on a test object in order to characterize the hard x-ray nanobeam in a scanning x-ray microscope. In addition to a high resolution image of the test object, a detailed quantitative picture of the complex wave field in the nanofocus is obtained with high spatial resolution and dynamic range. Both are the result of high statistics due to the large number of diffraction patterns. The method yields a complete description of the focus, is robust against inaccuracies in sample positioning, and requires no particular shape or prior knowledge of the test object.

引用

页数：3

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