Two-dimensional modeling of slot-excited surface waves in bounded planar plasmas

被引:5
作者
Abdel-Fattah, E [1 ]
Ghanashev, I [1 ]
Sugai, H [1 ]
机构
[1] Nagoya Univ, Dept Elect Engn, Chikusa Ku, Nagoya, Aichi 4648603, Japan
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 2000年 / 39卷 / 7A期
关键词
surface-wave plasma; slot antenna; surface-wave excitation; power reflection coefficient; mode jump;
D O I
10.1143/JJAP.39.4181
中图分类号
O59 [应用物理学];
学科分类号
摘要
The excitation of electromagnetic waves launched by a linear slot antenna in a planar bounded surface wave plasma is modeled and numerically analyzed. For simplicity, a two-dimensional (infinite along x) model is applied. The electromagnetic field distribution, the total field energy and the power reflection coefficient R are computed. All are found to depend critically on the electron density n(e), and the density dependencies qualitatively reproduce the known experimental behavior. In particular, the computed R-n(e) dependencies with sharp minima at some resonance densities result in the experimentally observed [Ghanashev et al.: Jpn. J. Appl, Phys. 36 (1997) 4704] mode jumps and hysteresis loops in the power-density curves. The computational efficiency achieved through the two-dimensional formulation makes the model suitable for use as a part of a self-consistent analysis of the surface-wave plasma source operation.
引用
收藏
页码:4181 / 4187
页数:7
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