共 33 条
- [1] OXIDE ETCHING USING SURFACE-WAVE COUPLED PLASMA [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1994, 33 (12B): : 7037 - 7041
- [2] MODELING OF MICROWAVE DISCHARGES IN THE PRESENCE OF PLASMA RESONANCES [J]. PHYSICAL REVIEW E, 1995, 51 (06): : 6091 - 6103
- [6] FERREIRA FC, 1993, NATO ASI SERIES B, V302
- [7] RESIST STRIPPING IN AN O2 + H2O PLASMA DOWNSTREAM [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1991, 9 (02): : 357 - 361
- [8] Mode jumps and hysteresis in surface-wave sustained microwave discharges [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 1997, 36 (7B): : 4704 - 4710
- [9] Surface wave eigenmodes in a finite-area plane microwave plasma [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1997, 36 (1A): : 337 - 344
- [10] GHANASHEV I, IN PRESS PHYS PLASMA