Liquid-air based Fabry-Perot cavity on fiber tip sensor

被引：25

作者：

Llera, Miguel ^{[1
]}

Aellen, Thierry ^{[1
]}

Hervas, Javier ^{[2
]}

Salvade, Yves ^{[1
]}

Senn, Pascal ^{[3
,4
,5
,6
,7
]}

Le Floch, Sebastien ^{[1
]}

Keppner, Herbert ^{[1
]}

机构：

[1] Haute Ecole Arc Ingn, Grp Competence Metrol & Vis Ind, Rue Serre 7, CH-2610 St Imier, Switzerland

[2] Univ Politecn Valencia, ITEAM Res Inst, Opt & Quantum Commun Grp, Camino Vera S-N, E-46022 Valencia, Spain

[3] Hop Univ Geneve, Serv Otorhinolaryngol & Chirurg Cervicofaciale, Geneva, Switzerland

[4] Inselspital Bern, Dept ORL, Inner Ear Res Lab, Bern, Switzerland

[5] Inselspital Bern, Dept HNS, Inner Ear Res Lab, Bern, Switzerland

[6] Inselspital Bern, Dept DCR, Inner Ear Res Lab, Bern, Switzerland

[7] Univ Bern, CH-3012 Bern, Switzerland

来源：

OPTICS EXPRESS | 2016年 / 24卷 / 08期

关键词：

COCHLEAR IMPLANT; FORCES;

D O I：

10.1364/OE.24.008054

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

This paper presents a Fabry-Perot fiber tip sensor based on an air-liquid filled cavity. The cavity is sealed off by a thin gold coated membrane of parylene C, between 300 and 350 nm, creating a particularly flexible diaphragm. In order to retrieve and track the cavity of interest from other cavities formed within the sensor tip, a signal processing of the feedback signal is performed by inverse fast Fourier transform. The experimental sensor has been manufactured and tested for temperature, giving cavity length sensitivities of 6.1 nm/degrees C and 9.6 nm/degrees C for temperature increase and decrease respectively. The external gas pressure response gives a sensitivity of 15 nm/kPa. The fiber sensor has also been adapted for force sensing after silicone embedment and has shown a sensitivity of about 8.7 nm/mN. Finally, the sensor has been tested on insertion into a human temporal bone, proving that it could be an interesting candidate for insertion force monitoring for robotic cochlear implantation. (C) 2016 Optical Society of America

引用

页码：8054 / 8065

页数：12

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