Custom specific fabrication of integrated optical devices by excimer laser ablation of polymers

被引：10

作者：

Klotzbücher, T ^{[1
]}

Popp, M ^{[1
]}

Braune, T ^{[1
]}

Haase, J ^{[1
]}

Gaudron, A ^{[1
]}

Smaglinski, I ^{[1
]}

Paatzsch, T ^{[1
]}

Bauer, HD ^{[1
]}

Ehrfeld, W ^{[1
]}

机构：

[1] Inst Mikrotech Mainz GMBH, D-55129 Mainz, Germany

来源：

LASER APPLICATIONS IN MICROELECTRONIC AND OPTOELECTRONIC MANUFACTURING V | 2000年 / 3933卷

关键词：

integrated optical devices; passive fiber-to-chip coupling; polymers; rapid prototyping; Excimer laser ablation;

D O I：

10.1117/12.387565

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Excimer laser ablation was used for direct writing of multimode waveguide structures with passive fiber alignment grooves in polymers. First, integrated optical multimode components were simulated by the method of beam propagation (BPM) to optimize the optical performance of the design. Then the CNC codes for laser machining were created directly from the corresponding CAD data. ArF Excimer laser radiation of wavelength lambda=193 nm was used for ablation of adjacent grooves with a cross sectional area of 50x50 mu m(2) and lengths in the order of several mm. The laser-written grooves were filled with a liquid pre-polymer which after W-curing served as the waveguiding structures. The smoothest surfaces during laser ablation were achieved by applying several ablation scans with reduced material removal rates but higher feedrates. Debris formation, also influencing the surface roughness, was suppressed or minimized by making use of capable polymers. With the method of laser ablation linear waveguides of length 1=10 mm with insertion losses L-i in the range of 1.3 to 1.9 dB have been realized for lambda=1310 nm, depending on the polymer used. By means of 1x2-splitters, 4x4 as well as 4x16 starcouplers it was shown that laser ablation is a well suited tool for rapid prototyping of integrated optical multimode elements.

引用

页码：290 / 298

页数：9