pH-sensitive properties of barium strontium titanate (BST) thin films prepared by pulsed laser deposition technique

被引：14

作者：

Buniatyan, Vahe V. ^{[1
,2
]}

Abouzar, Maryam H. ^{[1
,3
]}

Martirosyan, Norayr W. ^{[2
]}

Schubert, Juergen ^{[3
]}

Gevorgian, Spartak ^{[4
]}

Schoening, Michael J. ^{[1
,3
]}

Poghossian, Arshak ^{[1
,3
]}

机构：

[1] Aachen Univ Appl Sci, Inst Nano & Biotechnol, D-52428 Julich, Germany

[2] State Engn Univ Armenia, Dept Microelect & Biomed Devices, Yerevan 0009, Armenia

[3] Res Ctr Julich, Inst Bio & Nanosyst, D-52425 Julich, Germany

[4] Chalmers, Dept Microtechnol & Nanosci, S-41296 Gothenburg, Sweden

来源：

PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE | 2010年 / 207卷 / 04期

关键词：

barium strontium titanate; PLD; biosensor; field effect sensor; FIELD-EFFECT TRANSISTORS; IDENTICAL TRANSDUCER PRINCIPLE; TUNABLE APPLICATIONS; SENSING PROPERTIES; CHEMICAL SENSORS; MEMBRANE; DEVICES; ISFET; FABRICATION; OXIDES;

D O I：

10.1002/pssa.200983310

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

pH sensitive properties of barium strontium titianate (BST) high k thin films as alternative gate material for field-effect capacitive (bio-) chemical sensors based on an electrolyte-insulator semiconductor system have been investigated. The BST films of different composition (Ba0.3Sr0.69TiO3, Ba0.25Sr0.75TiO3 and MG doped Ba0.8Sr0.2Mg0.1Ti0.9O3 were deposited by pulsed laser deposition technique from targets farbicated by self-propagating high-temperatures synthesis. The realised sensors have been electrochemically characterised by means of impedance-spectroscopy, capacitance-voltage and constant-capacitance method. The sensors possess a Nernstian-like pH sensitivity in the concentration range between pH 3 and 11 with a response time of 5-10 s. An equivalent circuit model for the BST-based capacitive field-effect sensor is discussed.(C) 2010 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim

引用

页码：824 / 830

页数：7

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