The structure and tribological behaviors of CrN and Cr-Ti-N coatings

被引：65
作者：
Zhang, G. A.
Yan, P. X.
Wang, P.
Chen, Y. M.
Zhang, J. Y. [1 ]
机构：
[1] Chinese Acad Sci, Lanzhou Inst Chem Phys, State Key Lab Solid Lubricat, Lanzhou 730000, Peoples R China
[2] Lanzhou Univ, Inst Plasma & Met Mat, Lanzhou 73000, Peoples R China
来源：
APPLIED SURFACE SCIENCE | 2007年 / 253卷 / 18期
基金：
中国国家自然科学基金;
关键词：
magnetron sputtering; Cr-Ti-N coatings; structure; tribological properties;
D O I：
10.1016/j.apsusc.2007.02.061
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
The Cr-Ti-N coatings with different composition were deposited in a medium frequency magnetron sputtering system on Si (1I 1 1) substrates. The structures, surface morphology and wear properties were measured. The binary CrN coatings, formed a single-phase fcc structure with nearly random (1 1 1), (2 0 0) and (2 2 0) orientation, while for the Ti was introduced, coatings show a preferred orientation of (2 0 0). Cr-Ti-N coating shows a much smoother surface than CrN coating. Cr-Ti-N coating with 31.75% Ti content shows the best wear behavior. The excellent tribological properties of this composition coating are corresponding to the solid solution nitride structures. (c) 2007 Published by Elsevier B.V.
引用
收藏
页码：7353 / 7359
页数：7
相关论文
共 20 条
[1]   Microstructure, stress and mechanical properties of arc-evaporated Cr-C-N coatings [J].
Almer, J ;
Odén, M ;
Håkansson, G .
THIN SOLID FILMS, 2001, 385 (1-2) :190-197
[2]   Characterization of titanium chromium nitride nanocomposite protective coatings [J].
Aouadi, SM ;
Wong, KC ;
Mitchell, KAR ;
Namavar, F ;
Tobin, E ;
Mihut, DM ;
Rohde, SL .
APPLIED SURFACE SCIENCE, 2004, 229 (1-4) :387-394
[3]   The nanostructure and mechanical properties of PVD CrCu (N) coatings [J].
Baker, MA ;
Kench, PJ ;
Joseph, MC ;
Tsotsos, C ;
Leyland, A ;
Matthews, A .
SURFACE & COATINGS TECHNOLOGY, 2003, 162 (2-3) :222-227
[4]   Characterization of (Cr,Ta)N hard coatings reactively sputtered at low temperature [J].
Cekada, M ;
Panjan, P ;
Navinsek, B ;
Cvelbar, F .
VACUUM, 1999, 52 (04) :461-467
[5]   Chromium nitride coatings produced by ion beam assisted deposition [J].
Demaree, JD ;
Fountzoulas, CG ;
Hirvonen, JK .
SURFACE & COATINGS TECHNOLOGY, 1996, 86 (1-3) :309-315
[6]   Reactive plasma sprayed TiN coating and its tribological properties [J].
Feng, WR ;
Yan, DR ;
He, JN ;
Li, XZ ;
Dong, YC .
WEAR, 2005, 258 (5-6) :806-811
[7]   Characterization of hard chromium nitride coatings deposited by cathodic arc vapor deposition [J].
Grant, WK ;
Loomis, C ;
Moore, JJ ;
Olson, DL ;
Mishra, B ;
Perry, AJ .
SURFACE & COATINGS TECHNOLOGY, 1996, 86-7 (1-3) :788-796
[8]   Characterization of sputter-deposited chromium nitride thin films for hard coatings [J].
Hones, P ;
Sanjines, R ;
Levy, F .
SURFACE & COATINGS TECHNOLOGY, 1997, 94-5 (1-3) :398-402
[9]   Mechanical properties of hard chromium tungsten nitride coatings [J].
Hones, P ;
Consiglio, R ;
Randall, N ;
Lévy, F .
SURFACE & COATINGS TECHNOLOGY, 2000, 125 (1-3) :179-184
[10]   Mechanical properties of (Ti,Cr)N coatings deposited by inductively coupled plasma assisted direct current magnetron sputtering [J].
Jung, DH ;
Park, HS ;
Na, HD ;
Lim, JW ;
Lee, JJ ;
Joo, JH .
SURFACE & COATINGS TECHNOLOGY, 2003, 169 :424-427
12