Rayleigh surface wave in a piezoelectric wafer with subsurface damage

被引：26

作者：

Cao, Xiaoshan ^{[1
]}

Jin, Feng ^{[2
]}

Jeon, Insu ^{[1
]}

机构：

[1] Chonnam Natl Univ, Sch Mech Syst Engn, Kwangju 500757, South Korea

[2] Xi An Jiao Tong Univ, Sch Aerosp, MOE Key Lab Strength & Vibrat, Xian 710049, Peoples R China

来源：

APPLIED PHYSICS LETTERS | 2009年 / 95卷 / 26期

关键词：

electromechanical effects; nondestructive testing; piezoelectric thin films; Rayleigh waves; BLEUSTEIN-GULYAEV WAVES; ACOUSTIC-WAVES; STIFFNESS; POROSITY;

D O I：

10.1063/1.3276568

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

An analytical study is carried out on the propagation of Rayleigh surface waves in a piezoelectric wafer with subsurface damage. The region of subsurface damage is considered to be a functionally graded piezoelectric thin film. The findings show the influence of the gradient parameter, thickness of the region of subsurface damage, and three different types of damage on the properties of surface-wave propagation, including the phase velocity and electromechanical coupling factor. They can provide theoretical guidance in nondestructive evaluation for the analysis of the reliability and durability of electronic devices made of piezoelectric wafers.

引用

页数：3

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