[1] Chalmers Univ Technol, Microtechnol Ctr Chalmers, Dept Microelect & Nanosci Phys Elect & Photon, S-41296 Gothenburg, Sweden
[2] Chinese Acad Sci, Shanghai Inst Tech Phys, Natl Lab Infrared Phys, Shanghai 200083, Peoples R China
[3] Natl Res Council Canada, Inst Microstruct Sci, Ottawa, ON K1A 0R6, Canada