The promising gas-dynamic schemes of vacuum deposition from the supersonic gas mixture flows

被引：0
|
作者：
Maltsev, R. V. [1 ]
Rebrov, A. K. [1 ]
机构：
[1] Russian Acad Sci, Siberian Branch, Inst Thermophys, Novosibirsk 630090 90, Russia
来源：
PROCEEDINGS OF THE 17TH INTERNATIONAL VACUUM CONGRESS/13TH INTERNATIONAL CONFERENCE ON SURFACE SCIENCE/INTERNATIONAL CONFERENCE ON NANOSCIENCE AND TECHNOLOGY | 2008年 / 100卷
关键词：
D O I：
10.1088/1742-6596/100/8/082012
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
Gas jet deposition (GJD) becomes promising method of thin film and nanoparticle deposition. This paper is focused on elaboration of new methods of GJD based on different gas dynamic schemes of flow formation and interaction with substrate. Using direct statistical simulation method, the analysis was performed for: a) interaction of the jet from the sonic nozzle with a substrate; b) fan flow in the result of interaction of two opposite jets; c) convergent flow from the ring nozzle, directional to the axis; d) interaction of the jet after convergent flow with the substrate; e) fan flow in the result of interaction of two opposite jets after convergent expansion.
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页数：4
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