Miniature high frequency focused ultrasonic transducers for minimally invasive imaging procedures

被引：30

作者：

Fleischman, A ^{[1
]}

Modi, R ^{[1
]}

Nair, A ^{[1
]}

Talman, J ^{[1
]}

Lockwood, G ^{[1
]}

Roy, S ^{[1
]}

机构：

[1] Cleveland Clin Fdn, Dept Biomed Engn, Cleveland, OH 44195 USA

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2003年 / 103卷 / 1-2期

关键词：

ultrasonic transducer; polymer transducer; PVDF; high frequency imaging; MEMS; minimally invasive procedures;

D O I：

10.1016/S0924-4247(02)00323-0

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Spherically focused, high frequency (30-50 MHz) ultrasonic imaging transducers are fabricated using poly(vinylidene) difluoride (PVDF) film and a membrane deflection technique that is compatible with CMOS microelectronics fabrication. Micromachined ultrasonic transducers with 0.75-2.00 mm-diameter apertures and f-numbers of 1.30-2.45 are fabricated and characterized. The transducers exhibit focused radiation patterns with 50 mum axial resolution and 51-92 mum lateral resolution and bandwidths of 80-110% around center frequency values. A miniature preamplifier hybrid circuit, which is designed to be mounted within the transducer housing, is fabricated and characterized to reveal a low noise level of 5.3 nV/rootH(z). Tissue imaging capabilities of the micromachined ultrasonic transducers are demonstrated through successful imaging of human cadaveric aorta. (C) 2003 Elsevier Science B.V. All rights reserved.

引用

页码：76 / 82

页数：7

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