Growth of alloy GaInP crystals by compositional conversion of InP layers grown on GaP substrates in an LPE system

被引:2
作者
Motogaito, A
Kimura, M
Dost, S
Katsuno, H
Tanaka, A
Sukegawa, T
机构
[1] Shizuoka Univ, Elect Res Inst, Hamamatsu, Shizuoka 432, Japan
[2] Univ Victoria, Ctr Adv Mat & Related Technol, Victoria, BC V8W 3P6, Canada
[3] Univ Victoria, Dept Mech Engn, Victoria, BC V8W 3P6, Canada
关键词
compositional conversion; GaInP alloy; liquid phase epitaxy; lattice-mismatch; heteroepitaxy; solid-liquid diffusion model;
D O I
10.1016/S0022-0248(97)00347-3
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
GaInP alloy layers with desired compositions were grown on GaP substrates using the compositional conversion technique. An InP layer grown on a GaP substrate was brought into contact with a Ga-In-P saturated solution and kept at a constant temperature in isothermal conditions. A relatively good GaInP layer was obtained. Furthermore, to have a better understanding of this mechanism, a solid-liquid diffusion numerical simulation model was applied. Numerical solutions agree with experimental results and explain well the conversion phenomenon.
引用
收藏
页码:275 / 280
页数:6
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