Elliptical x-ray microprobe mirrors by differential deposition

被引：115
|
作者：
Ice, GE
Chung, JS
Tischler, JZ
Lunt, A
Assoufid, L
机构：
[1] Oak Ridge Natl Lab, Oak Ridge, TN 37831 USA
[2] Beamline Technol, Tucson, AZ 85745 USA
[3] Argonne Natl Lab, Argonne, IL 60439 USA
来源：
REVIEW OF SCIENTIFIC INSTRUMENTS | 2000年 / 71卷 / 07期
关键词：
D O I：
10.1063/1.1150668
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
A differential coating method is described for fabricating high-performance x-ray microfocusing mirrors. With this method, the figure of ultrasmooth spherical mirrors can be modified to produce elliptical surfaces with low roughness and low figure errors. Submicron focusing is demonstrated with prototype mirrors. The differential deposition method creates stiff monolithic mirrors which are compact, robust, and easy to cool and align. Prototype mirrors have demonstrated gains of more than 10(4) in beam intensity while maintaining submilliradian divergence on the sample. This method of producing elliptical mirrors is well matched to the requirements of an x-ray microdiffraction Kirkpatrick-Baez focusing system. (C) 2000 American Institute of Physics. [S0034-6748(00)01607-5].
引用
收藏
页码：2635 / 2639
页数：5
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