Microcontact printing of alkanethiols on copper and its application in microfabrication

被引：148
作者：
Xia, YN
Kim, E
Mrksich, M
Whitesides, GM
机构：
[1] Department of Chemistry, Harvard University, Cambridge
来源：
CHEMISTRY OF MATERIALS | 1996年 / 8卷 / 03期
关键词：
D O I：
10.1021/cm950464+
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
Microcontact printing was used to generate patterned self-assembled monolayers of alkanethiolates on the surfaces of evaporated films of copper. These patterned SAMs could be directly used as ultrathin resists that protected the underlying copper from etching in aqueous solutions of FeCl3/ HCl or FeCl3/NH4Cl. Arrays of junctions of Ag/Ag2O/Cu were fabricated using a multistep procedure that combines metal evaporation, microcontact printing, and selective etching.
引用
收藏
页码：601 / &
页数：4
相关论文
共 19 条
[1]   AUTOPHOBIC PINNING OF DROPS OF ALKANETHIOLS ON GOLD [J].
BIEBUYCK, HA ;
WHITESIDES, GM .
LANGMUIR, 1994, 10 (12) :4581-4587
[2]  
COTTON FA, 1988, ADV INORG CHEM RAD, P759
[3]  
DIRSKE TP, 1971, ZINC SILVER OXIDE BA, P100
[4]   SYNTHESIS, STRUCTURE, AND PROPERTIES OF MODEL ORGANIC-SURFACES [J].
DUBOIS, LH ;
NUZZO, RG .
ANNUAL REVIEW OF PHYSICAL CHEMISTRY, 1992, 43 :437-463
[5]  
GLANG R, 1970, HDB THIN FILM TECHNO, pCH7
[6]   PATTERNED SELF-ASSEMBLED MONOLAYERS FORMED BY MICROCONTACT PRINTING DIRECT SELECTIVE METALIZATION BY CHEMICAL-VAPOR-DEPOSITION ON PLANAR AND NONPLANAR SUBSTRATES [J].
JEON, NL ;
NUZZO, RG ;
XIA, YN ;
MRKSICH, M ;
WHITESIDES, GM .
LANGMUIR, 1995, 11 (08) :3024-3026
[7]   SURFACE-CHEMISTRY OF THIOLS ON COPPER - AN EFFICIENT WAY OF PRODUCING MULTILAYERS [J].
KELLER, H ;
SIMAK, P ;
SCHREPP, W ;
DEMBOWSKI, J .
THIN SOLID FILMS, 1994, 244 (1-2) :799-805
[8]   PATTERNING SELF-ASSEMBLED MONOLAYERS - APPLICATIONS IN MATERIALS SCIENCE [J].
KUMAR, A ;
BIEBUYCK, HA ;
WHITESIDES, GM .
LANGMUIR, 1994, 10 (05) :1498-1511
[9]   FEATURES OF GOLD HAVING MICROMETER TO CENTIMETER DIMENSIONS CAN BE FORMED THROUGH A COMBINATION OF STAMPING WITH AN ELASTOMERIC STAMP AND AN ALKANETHIOL INK FOLLOWED BY CHEMICAL ETCHING [J].
KUMAR, A ;
WHITESIDES, GM .
APPLIED PHYSICS LETTERS, 1993, 63 (14) :2002-2004
[10]   SELF-ASSEMBLED MONOLAYERS OF N-ALKANETHIOLATES ON COPPER ARE BARRIER FILMS THAT PROTECT THE METAL AGAINST OXIDATION BY AIR [J].
LAIBINIS, PE ;
WHITESIDES, GM .
JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 1992, 114 (23) :9022-9028
12