New optical probes using InP-based cantilevers

被引：4
作者：
Castagne, M [1 ]
Belier, B
Gall, P
Benfedda, M
Seassal, C
Spisser, A
Leclerc, JL
Viktorovich, P
机构：
[1] Univ Montpellier 2, Ctr Elect & Microoptoelect Montpellier, LINCS, F-34095 Montpellier 5, France
[2] Ecole Cent Lyon, LEAME, F-69131 Ecully, France
来源：
ULTRAMICROSCOPY | 1998年 / 71卷 / 1-4期
关键词：
microfabrication; cantilevers; integrated photodetector; near field optics;
D O I：
10.1016/S0304-3991(97)00113-7
中图分类号：
TH742 [显微镜];
学科分类号：
摘要：
Cantilevers made of III-V ternary compounds have been especially designed to obtain a spring constant in the classical range of 0.1 N/m. They are successfully fabricated by epitaxial growth techniques on InP substrate and wet etching. The layer structure is intended to further contribute in a microoptoelectronic device. The cantilever is afterwards provided with a carbon supertip which is expected to play simultaneously both roles of an atomic force sensor and an optical near-field converter. (C) 1998 Elsevier Science B.V. All rights reserved.
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收藏
页码：81 / 84
页数：4
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