Immersion transmission ellipsometry (ITE): a new method for the precise determination of the 3D indicatrix of thin films

被引：6

作者：

Jung, CC ^{[1
]}

Stumpe, J ^{[1
]}

机构：

[1] Fraunhofer Inst Appl Polymer Res, D-14476 Potsdam, Germany

来源：

APPLIED PHYSICS B-LASERS AND OPTICS | 2005年 / 80卷 / 02期

关键词：

D O I：

10.1007/s00340-004-1695-z

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

The new method of immersion transmission ellipsometry (ITE) [1] has been developed. It allows the highly accurate determination of the absolute three-dimensional (3D) refractive indices of anisotropic thin films. The method is combined with conventional ellipsometry in transmission and reflection, and the thickness determination of anisotropic films solely by optical methods also becomes more accurate. The method is applied to the determination of the 3D refractive indices of thin spin-coated films of an azobenzene-containing liquid-crystalline copolymer. The development of the anisotropy in these films by photo-orientation and subsequent annealing is demonstrated. Depending on the annealing temperature, oblate or prolate orders are generated.

引用

页码：231 / 238

页数：8

共 39 条

[1]

ANDERLE K, 1989, MAKROMOL CHEM-RAPID, V10, P477

[2] Amperometric glucose sensor based on glucose oxidase immobilized in electrochemically generated poly(ethacridine) [J].

Xu, JJ ;

Chen, HY .

ANALYTICA CHIMICA ACTA, 2000, 423 (01) :101-106

[3] In situ determination of glass transition temperatures in thin polymer films [J].

Benecke, C ;

Schmitt, K ;

Schadt, M .

LIQUID CRYSTALS, 1996, 21 (04) :575-580

[4]

BERG RH, 1995, Patent No. 9638410

[5] Ellipsometric method for investigation of the optical anisotropy of thin films: theory and calculations [J].

Bortchagovsky, EG .

THIN SOLID FILMS, 1997, 307 (1-2) :192-199

[6] Optical anisotropy in films of photoaddressable polymers [J].

Cimrová, V ;

Neher, D ;

Kostromine, S ;

Bieringer, T .

MACROMOLECULES, 1999, 32 (25) :8496-8503

[7] REVERSIBLE DIGITAL AND HOLOGRAPHIC OPTICAL STORAGE IN POLYMERIC LIQUID-CRYSTALS [J].

EICH, M ;

WENDORFF, JH ;

RECK, B ;

RINGSDORF, H .

MAKROMOLEKULARE CHEMIE-RAPID COMMUNICATIONS, 1987, 8 (01) :59-63

[8]

FISCHER T, 1997, MOL CRYST LIQ CRYST, V298, P213

[9] Sensitivity analysis of ellipsometry applied to uniaxial optical films [J].

Flueraru, C ;

Schrader, S ;

Motschmann, H ;

Zauls, V .

THIN SOLID FILMS, 2000, 379 (1-2) :15-22

[10]

FUHRMANN T, 2000, INT J POLYM MATER, V45, P621, DOI DOI 10.1080/00914030008035055

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