Spectroscopic study of the microwave plasma enhanced pulsed laser deposition for Y1Ba2Cu3O7-x superconducting thin films

被引：0

作者：

Chung, BC

Tsai, CH

Hsu, SS

Huang, CS

Tseng, TY

Lin, IN

机构：

[1] NATL TSING HUA UNIV,DEPT ELECTR ENGN,HSINCHU 300,TAIWAN

[2] NATL TSING HUA UNIV,INST ELECTR,HSINCHU 300,TAIWAN

[3] NATL TSING HUA UNIV,CTR MAT SCI,HSINCHU 300,TAIWAN

[4] NATL SCI COUNCIL,PRECIS INSTRUMENT DEV CTR,HSINCHU 300,TAIWAN

来源：

APPLIED SURFACE SCIENCE | 1996年 / 96-8卷 / 96-98期

关键词：

D O I：

10.1016/0169-4332(95)00485-8

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Microwave plasma enhanced pulsed laser deposition (PE-PLD) technique has successfully in-situ synthesized the epitaxial-like high quality Y1Ba2Cu3O7-x superconducting thin films. It has remarkably improved the films' surface morphology with fine grain, high dense and mirror-smooth. The PE-PLD emission spectra showed abundant active atomic oxygen produced and greatly enhanced in emission intensities of YBCO species sustaining to the substrate surface of extended deposition distance (85 mm), that is believed to explain the improvement of deposition kinetics and surface morphology of YBCO superconducting thin films. The effects of microwave power, laser energy and oxygen pressure on the enhancement were investigated.

引用

页码：233 / 237

页数：5

共 7 条

[1]

AIDA T, 1989, JPN J APPL PHYS, V28, P635

[2] PREPARATION OF Y-BA-CU OXIDE SUPERCONDUCTOR THIN-FILMS USING PULSED LASER EVAPORATION FROM HIGH-TC BULK MATERIAL [J].