Focused Femtosecond Laser Pulses: A Versatile Tool for Three-Dimensional Writing of Micro-Nano Devices

被引：0
作者：
Eaton, Shane M. [1 ]
Criante, Luigino [3 ]
Lo Turco, Sara [3 ]
Guduru, Surya S. K. [3 ]
Ramponi, Roberta [2 ]
机构：
[1] Politecn Milan, Dipartimento Fis, I-20133 Milan, Italy
[2] CNR, Ist Foton & Nanotecnol, Milan, Italy
[3] Ist Italiano Tecnol, Ctr Nano Sci & Technol, Milan, Italy
来源：
2014 16TH INTERNATIONAL CONFERENCE ON TRANSPARENT OPTICAL NETWORKS (ICTON) | 2014年
关键词：
femtosecond laser; micromachining; two photon polymerization; glasses; polymers;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Femtosecond laser microfabrication is a versatile method able to form surface ablated features in any material, buried waveguides and microchannels in transparent glasses, and 3D microstructures in photoresists via two photon polymerization. In this paper, we describe the fundamentals of each of these three important modalities of the femtosecond laser micromachining method and present several novel devices that have application in lab on a chip, biosensing and display industries.
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