Copper oxide reduction through vacuum annealing

被引：177

作者：

Lee, SY ^{[1
]}

Mettlach, N ^{[1
]}

Nguyen, N ^{[1
]}

Sun, YM ^{[1
]}

White, JM ^{[1
]}

机构：

[1] Univ Texas, Texas Mat Inst, Ctr Mat Chem, Austin, TX 78712 USA

来源：

APPLIED SURFACE SCIENCE | 2003年 / 206卷 / 1-4期

基金：

美国国家科学基金会;

关键词：

copper; oxide; reduction; X-ray photoelectron spectroscopy;

D O I：

10.1016/S0169-4332(02)01239-4

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

The reduction of partially- and fully-oxidized Cu films was carried out by vacuum annealing, and the reduction mechanisms were investigated in situ by XPS. For a partially-oxidized Cu film, CuO was reduced to CU2O around 380 K, and the Cu2O concentration decreased with increasing annealing temperature and fell below the XPS detection limit at 673 K. For a fully-oxidized Cu film, CuO started to form Cu2O around 473 K, and Cu began to appear at 673 K. The results for a partially-oxidized film are interpreted in terms of oxygen diffusion into bulk Cu rather than oxygen desorption into vacuum. (C) 2002 Elsevier Science B.V. All rights reserved.

引用

页码：102 / 109

页数：8

共 14 条

[1] Barin I., 1989, THERMOCHEMICAL DATA
[2] Chastain J., 1995, HDB XRAY PHOTOELECTR
[3] HAUFFE K, 1965, OXID MET, P161
[4] JAIN L, 1991, J APPL PHYS, V70, P2820
[5] Chemical and thermal reduction of thin films of copper (II) oxide and copper (I) oxide
Kirsch, PD
Ekerdt, JG
[J]. JOURNAL OF APPLIED PHYSICS, 2001, 90 (08) : 4256 - 4264
[6] KIRSH PD, COMMUNICATION
[7] OXIDATION AND REDUCTION OF COPPER-OXIDE THIN-FILMS
LI, J
VIZKELETHY, G
REVESZ, P
MAYER, JW
TU, KN
[J]. JOURNAL OF APPLIED PHYSICS, 1991, 69 (02) : 1020 - 1029
[8] INFLUENCE OF CARBON ON THE ENHANCED OXYGEN LOSS IN COPPER-OXIDE FILMS
LI, J
VIZKELETHY, G
REVESZ, P
MAYER, JW
MATIENZO, LJ
EMMI, F
ORTEGA, C
SIEJKA, J
[J]. APPLIED PHYSICS LETTERS, 1991, 58 (12) : 1344 - 1346
[9] Pilling NB, 1923, J I MET, V29, P529
[10] Poulston S, 1996, SURF INTERFACE ANAL, V24, P811, DOI 10.1002/(SICI)1096-9918(199611)24:12<811::AID-SIA191>3.0.CO

← 1 2 →