Graphene-based humidity sensors: the origin of alternating resistance change

被引:65
作者
Popov, V. I. [1 ]
Nikolaev, D. V. [1 ]
Timofeev, V. B. [1 ]
Smagulova, S. A. [1 ]
Antonova, I. V. [1 ,2 ,3 ,4 ]
机构
[1] Ammosov North Eastern Fed Univ, 58 Belinsky St, Yakutsk 677000, Russia
[2] Rzhanov Inst Semicond Phys SB RAS, 13 Lavrentiev Ave, Novosibirsk 630090, Russia
[3] Novosibirsk State Univ, 6 Pirogov Str, Novosibirsk 630090, Russia
[4] Novosibirsk State Tech Univ, 20 K Marx Str, Novosibirsk 630073, Russia
关键词
CVD graphene; humidity sensor; resistance change; nature of response; OXIDE; FABRICATION; WATER;
D O I
10.1088/1361-6528/aa7b6e
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
The response of a graphene-based humidity sensor is considered as a function of film structures. Analysis of the resistance changes due to water molecule adsorption on the graphene or multi-layer graphene (MLG) surface is performed for films with different structures and resistivities from hundreds of ohms/sq to hundreds of kilo-ohms/sq. The results revealed possible increase, decrease and non-monotonous behavior of resistance with changes in film structure. Adsorption of water molecules at grain boundary defects is assumed to lead to an increase in film resistivity due to the donor property of water and the p-type conductivity of graphene. Another type of conductive center with a higher capture cross-section is realized in the case of water molecule adsorption at edge defects in MLG films (the formation of conductive chains with ionic conductivity). If these chains form a continuous network the film resistivity decreases. The result of the competition between the opposite effects of the conductivity compensation and formation of the water-based conductive chains depends on the film structure and determines the response of humidity sensors. Sensor sensitivity is found to increase when only one type of defect determines water adsorption (edge defects or grain boundary defects).
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页数:9
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