Organic vapour sensing by porous silicon: Influence of molecular kinetics in selectivity studies

被引:28
作者
Dhanekar, Saakshi [1 ]
Islam, S. S. [1 ]
Islam, T. [1 ]
Shukla, A. K. [2 ]
Harsh [3 ]
机构
[1] Jamia Millia Islamia, Nanosensor Res Lab, New Delhi 110025, India
[2] Indian Inst Technol, Dept Phys, New Delhi 110016, India
[3] Def Res & Dev Org, Solid State Phys Lab, Delhi 110054, India
关键词
Porous silicon; Organic vapour; Sensor; SEM; GAS SENSOR; SENSITIVITY;
D O I
10.1016/j.physe.2010.01.017
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Porous silicon (PS) samples were prepared under different anodization conditions and correspondingly the sensor parameters were studied for organic vapours like methanol, ethanol, propanol, acetone and benzene at low ppm level using capacitive measurements. The surface morphology of the samples was characterized by scanning electron microscopy (SEM), whereas Raman spectroscopic studies were made to identify the surface species formed due to surface passivation. Selective response was observed for either methanol or ethanol depending on the combined effect of the pore morphology of PS, its surface passivation and the concentration dependent molecular kinetics in vapour phase. A probabilistic approach of the concentration dependent vapour molecular kinetics is demonstrated to explain the sensor performance and selectivity studies. (C) 2010 Elsevier B.V. All rights reserved.
引用
收藏
页码:1648 / 1652
页数:5
相关论文
共 19 条
[1]  
ALWAN AM, 2007, ENG TECHNOL, V25, P1023
[2]   Electrical porous silicon chemical sensor for detection of organic solvents [J].
Archer, M ;
Christophersen, M ;
Fauchet, PM .
SENSORS AND ACTUATORS B-CHEMICAL, 2005, 106 (01) :347-357
[3]   Pore size optimisation of humidity sensor - a probabilistic approach [J].
Banerjee, G ;
Sengupta, K .
SENSORS AND ACTUATORS B-CHEMICAL, 2002, 86 (01) :34-41
[4]   CHx/PS/Si as structure for propane sensing [J].
Belhousse, S ;
Gabouze, N ;
Cheraga, H ;
Henda, K .
THIN SOLID FILMS, 2005, 482 (1-2) :253-257
[5]  
Canham Leigh., 1997, Properties of porous silicon
[6]  
Choi SH, 2009, MATER SCI-POLAND, V27, P603
[7]  
Dhanekar S., 2009, SENS TRANSDUCERS, V6, P117
[8]   Photoluminescence quenching of porous silicon in gas and liquid phases -: the role of dielectric quenching and capillary condensation effects [J].
Dian, J ;
Chvojka, T ;
Vrkoslav, V ;
Jelínek, I .
PHYSICA STATUS SOLIDI C - CONFERENCES AND CRITICAL REVIEWS, VOL 2, NO 9, 2005, 2 (09) :3481-3485
[9]   Porous silicon layers used for gas sensor applications [J].
Foucaran, A ;
PascalDelannoy, F ;
Giani, A ;
Sackda, A ;
Combette, P ;
Boyer, A .
THIN SOLID FILMS, 1997, 297 (1-2) :317-320
[10]   Porous silicon organic vapor sensor [J].
Garcia Salgado, G. ;
Diaz Becerril, T. ;
Juarez Santiesteban, H. ;
Rosendo Andres, E. .
OPTICAL MATERIALS, 2006, 29 (01) :51-55