[1] Korea Adv Inst Sci & Technol, Dept Mech Engn, Daejeon 34141, South Korea
[2] Korea Polytech Univ, Res Inst Adv Convergence Technol, Dept Adv Convergence Technol, Siheung Si 15073, South Korea
[3] Sejong Univ, Dept Intelligent & Mechatron Engn, Seoul 05006, South Korea
[4] Korea Polytech Univ, Dept Nano & Semicond Engn, Siheung Si 15073, South Korea
[5] Nanyang Technol Univ, Sch Mech & Aerosp Engn, Singapore 639798, Singapore