Investigation of Processes on the Surface and in the Bulk of Magnetron Materials under Thermal and Thermoacoustic Treatment during Vacuum Pumping of the Air Atmosphere

被引：0

作者：

Khanbekov, I. F. ^{[1
,2
]}

Petrov, V. S. ^{[2
]}

Li, I. P. ^{[2
]}

Polunina, A. A. ^{[2
]}

Loktev, D. N. ^{[2
]}

机构：

[1] Bauman Moscow State Tech Univ, Moscow 105005, Russia

[2] AO Pluton, Moscow 105120, Russia

来源：

INORGANIC MATERIALS-APPLIED RESEARCH | 2021年 / 12卷 / 03期

关键词：

vacuum; pumping; thermal desorption; ultrasound; acoustics desorption; electrovacuum device;

D O I：

10.1134/S2075113321030187

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A method for measuring the relative amount of gas released from the magnetron during its vacuum pumping is presented. Equations describing three main reactions during pumping are obtained. The developed method is tested on model objects and used to measure the relative amount of gas released from a serial magnetron during vacuum pumping. The efficiency of pumping out the magnetron is analyzed for various methods of degassing. A method is proposed for accelerating desorption-diffusion processes when the magnetron body is treated with ultrasonic vibrations simultaneously with its heating during vacuum pumping, which increases the gas release efficiency more than twofold.

引用

页码：680 / 685

页数：6

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