Room-Temperature Ammonia Sensor Based on ZnO Nanorods Deposited on ST-Cut Quartz Surface Acoustic Wave Devices

被引：22

作者：

Li, Wei ^{[1
]}

Guo, Yuanjun ^{[1
]}

Tang, Yongliang ^{[1
]}

Zu, Xiaotao ^{[1
]}

Ma, Jinyi ^{[2
]}

Wang, Lu ^{[2
]}

Fu, Yong Qing ^{[1
,3
]}

机构：

[1] Univ Elect Sci & Technol China, Sch Phys Elect, Chengdu 610054, Peoples R China

[2] Sichuan Inst Piezoelect & Acoustoopt Technol, Chongqing 400060, Peoples R China

[3] Univ Northumbria, Fac Engn & Environm, Newcastle Upon Tyne NE1 8ST, Tyne & Wear, England

来源：

SENSORS | 2017年 / 17卷 / 05期

基金：

中国国家自然科学基金; 英国工程与自然科学研究理事会;

关键词：

NH3; sensor; surface acoustic wave (SAW) device; ZnO nanorods; seed layer-free growth; GAS SENSORS; ARRAYS; SENSITIVITY; FABRICATION;

D O I：

10.3390/s17051142

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

Using a seed layer-free hydrothermal method, ZnO nanorods (NRs) were deposited on ST-cut quartz surface acoustic wave (SAW) devices for ammonia sensing at room temperature. For a comparison, a ZnO film layer with a thickness of 30 nm was also coated onto an ST-cut quartz SAW device using a sol-gel and spin-coating technique. The ammonia sensing results showed that the sensitivity, repeatability and stability of the ZnO NR-coated SAWdevice were superior to those of the ZnO film-coated SAW device due to the large surface-to-volume ratio of the ZnO NRs.

引用

页数：10

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