Comparative study of polar and semipolar (11(2)over-bar2) InGaN layers grown by metalorganic vapour phase epitaxy

被引:11
作者
Dinh, Duc V. [1 ]
Oehler, F. [2 ]
Zubialevich, V. Z. [1 ]
Kappers, M. J. [2 ]
Alam, S. N. [1 ,3 ]
Caliebe, M. [4 ]
Scholtz, F. [4 ]
Humphreys, C. J. [2 ]
Parbrook, P. J. [1 ,3 ]
机构
[1] Univ Coll Cork, Tyndall Natl Inst, Cork, Ireland
[2] Univ Cambridge, Dept Mat Sci & Met, Cambridge CB2 3QZ, England
[3] Univ Coll Cork, Sch Engn, Cork, Ireland
[4] Univ Ulm, Inst Optoelect, D-89069 Ulm, Germany
基金
爱尔兰科学基金会; 欧盟第七框架计划; 英国工程与自然科学研究理事会;
关键词
YELLOW LUMINESCENCE; GAN; LOCALIZATION; SAPPHIRE; POWER;
D O I
10.1063/1.4898569
中图分类号
O59 [应用物理学];
学科分类号
摘要
InGaN layers were grown simultaneously on (11 (2) over bar2) GaN and (0001) GaN templates by metalorganic vapour phase epitaxy. At higher growth temperature (>= 750 degrees C), the indium content (<15%) of the (11<(2)over bar>2) and (0001) InGaN layers was similar. However, for temperatures less than 750 degrees C, the indium content of the (11 (2) over bar2) InGaN layers (15%-26%) were generally lower than those with (0001) orientation (15%-32%). The compositional deviation was attributed to the different strain relaxations between the (11 (2) over bar2) and (0001) InGaN layers. Room temperature photoluminescence measurements of the (11 (2) over bar2) InGaN layers showed an emission wavelength that shifts gradually from 380 nm to 580 nm with decreasing growth temperature (or increasing indium composition). The peak emission wavelength of the (11 (2) over bar2) InGaN layers with an indium content of more than 10% blue-shifted a constant value of approximate to(50-60) nm when using higher excitation power densities. This blue-shift was attributed to band filling effects in the layers. (C) 2014 AIP Publishing LLC.
引用
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页数:7
相关论文
共 38 条
[1]   V-shaped pits formed at the GaN/AlN interface [J].
Bai, J ;
Wang, T ;
Parbrook, PJ ;
Ross, IM ;
Cullis, AG .
JOURNAL OF CRYSTAL GROWTH, 2006, 289 (01) :63-67
[2]   Effects of Basal Stacking Faults on Electrical Anisotropy of Nonpolar a-Plane (11(2)over-bar0) GaN Light-Emitting Diodes on Sapphire Substrate [J].
Baik, Kwang Hyeon ;
Seo, Yong Gon ;
Hong, Soon-Ku ;
Lee, Seogwoo ;
Kim, Jaebum ;
Son, Ji-Su ;
Hwang, Sung-Min .
IEEE PHOTONICS TECHNOLOGY LETTERS, 2010, 22 (09) :595-597
[3]   Indium and impurity incorporation in InGaN films on polar, nonpolar, and semipolar GaN orientations grown by ammonia molecular beam epitaxy [J].
Browne, David A. ;
Young, Erin C. ;
Lang, Jordan R. ;
Hurni, Christophe A. ;
Speck, James S. .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2012, 30 (04)
[4]   Indium kinetics during the plasma-assisted molecular beam epitaxy of semipolar (11-22) InGaN layers [J].
Das, A. ;
Magalhaes, S. ;
Kotsar, Y. ;
Kandaswamy, P. K. ;
Gayral, B. ;
Lorenz, K. ;
Alves, E. ;
Ruterana, P. ;
Monroy, E. .
APPLIED PHYSICS LETTERS, 2010, 96 (18)
[5]   Growth and characterizations of semipolar (11(2)over-bar2) InN [J].
Dinh, Duc V. ;
Skuridina, D. ;
Solopow, S. ;
Frentrup, M. ;
Pristovsek, M. ;
Vogt, P. ;
Kneissl, M. ;
Ivaldi, F. ;
Kret, S. ;
Szczepanska, A. .
JOURNAL OF APPLIED PHYSICS, 2012, 112 (01)
[6]   Strain effects on indium incorporation and optical transitions in green-light InGaN heterostructures of different orientations [J].
Durnev, M. V. ;
Omelchenko, A. V. ;
Yakovlev, E. V. ;
Evstratov, I. Yu. ;
Karpov, S. Yu. .
PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 2011, 208 (11) :2671-2675
[7]   Indium incorporation and optical transitions in InGaN bulk materials and quantum wells with arbitrary polarity [J].
Durnev, M. V. ;
Omelchenko, A. V. ;
Yakovlev, E. V. ;
Evstratov, I. Yu ;
Karpov, S. Yu .
APPLIED PHYSICS LETTERS, 2010, 97 (05)
[8]   Cathodoluminescence spectroscopy of epitaxial-lateral-overgrown nonpolar (11-20) and semipolar (11-22) GaN in relation to microstructural characterization [J].
Guhne, T. ;
Bougrioua, Z. ;
Vennegues, P. ;
Leroux, M. ;
Albrecht, M. .
JOURNAL OF APPLIED PHYSICS, 2007, 101 (11)
[9]   Characterization of threading dislocations in GaN epitaxial layers [J].
Hino, T ;
Tomiya, S ;
Miyajima, T ;
Yanashima, K ;
Hashimoto, S ;
Ikeda, M .
APPLIED PHYSICS LETTERS, 2000, 76 (23) :3421-3423
[10]   Analysis of indium incorporation in non-and semipolar GaInN QW structures: comparing x-ray diffraction and optical properties [J].
Joenen, H. ;
Bremers, H. ;
Rossow, U. ;
Langer, T. ;
Kruse, A. ;
Hoffmann, L. ;
Thalmair, J. ;
Zweck, J. ;
Schwaiger, S. ;
Scholz, F. ;
Hangleiter, A. .
SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 2012, 27 (02)