Optical Properties of Diamond Like Carbon Nanocomposite Thin films

被引：8
作者：
Alam, Md Shahba [1 ]
Mukherjee, Nillohit [2 ]
Ahmed, Sk. Faruque [1 ]
机构：
[1] Aliah Univ, Dept Phys, Nanosci Lab, 2A-27, Kolkata 700156, India
[2] Indian Inst Engn Sci & Technol, Ctr Excellence Green Energy & Sensor Syst, Howrah 711103, India
来源：
2ND INTERNATIONAL CONFERENCE ON CONDENSED MATTER AND APPLIED PHYSICS (ICC-2017) | 2018年 / 1953卷
关键词：
D O I：
10.1063/1.5032865
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
The optical properties of silicon incorporated diamond like carbon (Si-DLC) nanocomposite thin films have been reported. The Si-DLC nanocomposite thin film deposited on glass and silicon substrate by radio frequency plasma enhanced chemical vapor deposition (RF-PECVD) process. Fourier transformed infrared spectroscopic analysis revealed the presence of different bonding within the deposited films and deconvolution of FTIR spectra gives the chemical composition i.e., sp(3)/sp(2) ratio in the films. Optical band gap calculated from transmittance spectra increased from 0.98 to 2.21 eV with a variation of silicon concentration from 0 to 15.4 at. %. Due to change in electronic structure by Si incorporation, the Si-DLC film showed a broad photoluminescence (PL) peak centered at 467 nm, i.e., in the visible range and its intensity was found to increase monotonically with at. % of Si.
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页数：4
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