Phosphorus gettering in multicrystalline silicon studied by neutron activation analysis

被引:44
作者
Macdonald, D [1 ]
Cuevas, A [1 ]
Kinomura, A [1 ]
Nakano, Y [1 ]
机构
[1] Australian Natl Univ, Fac Engn & Informat Technol, Dept Engn, Canberra, ACT 0200, Australia
来源
CONFERENCE RECORD OF THE TWENTY-NINTH IEEE PHOTOVOLTAIC SPECIALISTS CONFERENCE 2002 | 2002年
关键词
D O I
10.1109/PVSC.2002.1190514
中图分类号
TE [石油、天然气工业]; TK [能源与动力工程];
学科分类号
0807 ; 0820 ;
摘要
Neutron Activation Analysis (NAA) is a powerful and sensitive technique for measuring trace amounts of impurities. In this work, we have applied NAA to the problem of identifying metallic impurities within the bulk of solar-grade cast multicrystalline silicon (mc-Si) wafers. In particular, the change in concentrations of these contaminants after phosphorus gettering is monitored, revealing a marked reduction in some metal species, but not in others.
引用
收藏
页码:285 / 288
页数:4
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